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Sputtering Vacuum Coater

Article source:Zhenhua vacuum
Read:10
Published:24-07-12

A sputtering vacuum coater is a device used to deposit thin films of material onto a substrate. This process is commonly used in the production of semiconductors, solar cells, and various types of coatings for optical and electronic applications. Here’s a basic overview of how it works:

1.Vacuum Chamber: The process takes place inside a vacuum chamber to reduce contamination and allow for better control over the deposition process.

2.Target Material: The material to be deposited is known as the target. This is placed inside the vacuum chamber.

3.Substrate: The substrate is the material on which the thin film will be deposited. It is also placed inside the vacuum chamber.

4.Plasma Generation: An inert gas, typically argon, is introduced into the chamber. A high voltage is applied to the target, creating a plasma (a state of matter consisting of free electrons and ions).

5.Sputtering: Ions from the plasma collide with the target material, knocking atoms or molecules off the target. These particles then travel through the vacuum and deposit onto the substrate, forming a thin film.

6.Control: The thickness and composition of the film can be precisely controlled by adjusting parameters such as the power applied to the target, the pressure of the inert gas, and the duration of the sputtering process.

–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua


Post time: Jul-12-2024