Vacuum coating equipment is a kind of thin film deposition technology in a vacuum environment, which is widely used in electronics, optics, material science, energy and so on. Vacuum coating equipment is mainly composed of the following parts:
Vacuum Chamber: This is the core part of the vacuum coating equipment, in which all the coating processes are carried out. The vacuum chamber must be able to withstand the vacuum environment and maintain good sealing.
Vacuum Pump: It is used to extract the air inside the vacuum chamber to create a vacuum environment. Common vacuum pumps include mechanical pumps and molecular pumps.
Evaporation Source: Used to heat and evaporate the coating material. Evaporation source can be resistance heating, electron beam heating, laser heating and so on.
Deposition frame (Substrate Holder): used to place the substrate to be coated. The substrate holder can be rotated or moved to ensure the uniformity of the coating.
Control System: Used to control the entire coating process, including the start and stop of the vacuum pump, the temperature control of the evaporation source, and the adjustment of the deposition rate.
Measuring and monitoring equipment: Used to monitor the key parameters in the coating process in real time, such as vacuum degree, temperature, deposition rate, etc.
Power supply system: to provide the required power for the vacuum coating equipment.
Cooling system: used to cool the vacuum chamber and other heat generating components to ensure the normal operation of the equipment.
The effective coordination of these components enables the vacuum coating equipment to precisely control the thickness, composition and structure of the film to meet a variety of industrial and scientific needs.
–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua
Post time: Jul-27-2024