Vacuum coating machine on the pumping system has the following basic requirements:
(1) The coating vacuum system should have a sufficiently large pumping rate, which should not only rapidly pump out the gases released from the substrate and evaporated materials and the components in the vacuum chamber during the coating process, but also be able to rapidly pump out the gases released from the sputtering and ion coating process, as well as the gas leakage of the sputtering and ion coating process and the system.
The gas leakage during sputtering and ion coating process can also be quickly extracted. In order to improve the productivity of the coating machine, it should be able to operate quickly.
(2) The ultimate vacuum of the coating machine pumping system should be different according to the requirements of different films. Table 7-9 is the range of vacuum degree required by the coating process of different films.
(3) In the oil diffusion pump as the main pump pumping system requires the pump’s oil return rate is as small as possible, because the return oil vapor will pollute the surface of the workpiece and cause the quality of the film to decline. In the film quality requirements are particularly high in the coating process, it is best to use the oil-free pumping system. When using oil diffusion pump pumping system, should be set in the pump inlet adsorption trap, cold trap and other components, and should pay attention to the conductivity of the components to ensure that the vacuum system to maintain the maximum pumping speed.
(4) The leakage rate of the vacuum coating chamber and its pumping system should be small, i.e., even if it is a trace gas leakage, it will affect the quality of the film. Therefore, in order to ensure the sealing performance of the system, the total leakage rate of the system must be limited to the allowable range.
(5) Vacuum system operation, use and maintenance should be convenient, stable and reliable performance.
–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua
Post time: Dec-14-2023