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What is the technical principle of hollow cathode hard coating equipment?

Article source:Zhenhua vacuum
Read:10
Published:22-11-07

Ion coating means that the reactants or evaporated materials are deposited on the substrate by the ion bombardment of gas ions or evaporated materials while the evaporated materials are dissociated or gas discharged in a vacuum chamber. The technical principle of hollow cathode hard coating equipment is hollow cathode ion coating, which is a hollow cathode discharge deposition technology.

About the principle of hollow cathode discharge deposition: The hollow cathode discharge deposition technique uses a hot cathode discharge to generate a plasma beam, and the cathode is a hollow tantalum tube. The cathode and the auxiliary anode are close to each other, which are the two poles that ignite the arc discharge.
What is the technical principle of hollow ca
The hollow cathode discharge deposition gun ignites in two ways.
1, The use of high frequency electric field applied to the cathode tantalum tube, so that the cathode tantalum tube argon gas ionization into argon ions and then triggered by the cathode tantalum tube continuously bombarded by argon ions, until the heat to warm up to the minimum temperature standard of electron emission and generate plasma electron beam.

2, In the auxiliary anode and cathode tantalum tube between the application of about 300V DC voltage, the cathode tantalum tube still pass into the argon gas, in the 1Pa-10Pa argon gas pressure, the auxiliary anode and cathode tantalum tube glow discharge phenomenon, the generation of argon ion bombardment constantly bombard the cathode tantalum tube, until 2300K-2400K temperature, the cathode tantalum tube emits a large number of electrons, will be changed from “glow discharge” to “arc discharge”, this time the voltage is as low as 30V-60V, then as long as the cathode and anode between the power supply, you can generate plasma electron beam.

Cathodic coating equipment
1、Improve the original gun structure, from the original maximum current of 230A to 280A.
2、Improve the original cooling system structure, from the original 4℃ ice water machine cooling to room temperature cooling water cooling, saving the electricity cost for users.
3, Improve the original mechanical transmission structure, changed to magnetic fluid transmission structure, high temperature will not jam the rotating frame.
4, the effective coating area ¢ 650X1100, can accommodate 750 X 1250X600 oversized die and gear manufacturers of extra-long broach, with a very large volume.

The hollow cathode ion coating machine is mainly used in the plating of tools, molds, large mirror molds, plastic molds, hobbing knives and other products.


Post time: Nov-07-2022