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What are the factors that affect target poisoning in magnetron sputtering？
1, Formation of metal compounds on the target surface Where is the compound formed in the process of forming a compound from a metal target surface by a reactive sputtering process? Since the chemical reaction between the reactive gas particles and the target surface atoms produces compound atoms...Read more -
The use of mechanical pumps in vacuum coating machines
Mechanical pump is also called pre-stage pump, and is one of the most widely used low vacuum pumps, which uses oil to maintain the sealing effect and relies on mechanical methods to continuously change the volume of the suction cavity in the pump, so that the volume of the gas in the pumped conta...Read more
