HFCVD0606

Chipinda chokutira cha vacuum cha zida zoyikapo mpweya wamankhwala chimatenga mawonekedwe odziyimira pawokha osanjikiza awiri osanjikiza madzi, omwe ndi abwino komanso ofananirako pakuzizira, ndipo amakhala ndi mawonekedwe otetezeka komanso okhazikika.Zipangizozi zimapangidwira ndi zitseko ziwiri, mawindo owonetsera maulendo angapo ndi maulendo angapo owonjezera, omwe ndi osavuta kulumikiza kunja kwa zotumphukira zothandizira monga kuyeza kwa kutentha kwa infrared, kusanthula kwa spectral, kuyang'anira kanema ndi thermocouple.Lingaliro lapangidwe lapamwamba limapangitsa kukonzanso ndi kukonza tsiku ndi tsiku, kusintha kwa kasinthidwe ndi kukonzanso kwa zipangizo zosavuta komanso zosavuta, komanso kumachepetsa bwino ntchito ndi kukweza ndalama.

Zida zomwe zili:

1.Zigawo za inflation za zidazo makamaka zimaphatikizapo mita yothamanga kwambiri, valavu ya solenoid ndi thanki yosakanikirana ya gasi, zomwe zimatsimikizira kuwongolera kolondola kwa kayendedwe ka gasi, kusakanikirana kofanana ndi kudzipatula kotetezeka kwa mpweya wosiyanasiyana, ndipo amatha kusankha magawo agasi kuti agwiritse ntchito. madzi gasi gwero, atsogolere kusankha payekha osiyanasiyana magwero amadzimadzi mpweya, ndi kugwiritsa ntchito otetezeka magwero synthetic conductive diamondi ndi elekitirodi madzi boroni.
2.Msonkhano wotulutsa mpweya uli ndi pampu yopanda phokoso komanso yogwira mtima ya rotary vane vacuum pump ndi turbo molecular pump system yomwe imatha kukumana ndi chilengedwe chapamwamba cha vacuum.Makina ophatikizika a vacuum gauge okhala ndi resistance gauge ndi ionization gauge amagwiritsidwa ntchito poyezera vacuum, komanso capacitive film gauge system yomwe imatha kuyeza kuthamanga kwa mpweya wosiyanasiyana wosiyanasiyana mosiyanasiyana.Kuthamanga kwa deposition kumayang'aniridwa ndi valavu yowongolera bwino kwambiri.
3.Chigawo chamadzi ozizira chimakhala ndi kuthamanga kwamadzi kwamayendedwe ambiri, kuyenda, kuyeza kutentha ndi kuwunika kwa pulogalamu.Zigawo zosiyanasiyana zoziziritsa kukhosi zimadziyimira pawokha, zomwe ndizosavuta kuzindikira zolakwika mwachangu.Nthambi zonse zimakhala ndi masiwichi odziyimira pawokha, omwe ndi otetezeka komanso ogwira mtima.
4.Zigawo zoyendetsera magetsi zimagwiritsa ntchito mawonekedwe akuluakulu a makina a LCD ndi kugwirizana ndi PLC zonse zodziwikiratu kuti zithandize kusintha ndi kuitanitsa ndondomeko ya ndondomeko.Mzere wokhotakhota umawonetsa kusintha ndi mayendedwe osiyanasiyana, ndipo zida ndi magawo amachitidwe amajambulidwa okha ndikusungidwa kuti zithandizire kutsata zovuta komanso kusanthula kwa data.
5.The workpiece rack ili ndi servo motor kuwongolera kukweza ndi kutsitsa kwa gawo lapansi.The graphite kapena red copper substrate tebulo akhoza kusankhidwa.Kutentha kumayesedwa ndi thermocouple.
6.The rack zigawo zikhoza kupangidwa lonse kapena padera malinga ndi zofuna za makasitomala kuti akwaniritse zofunikira zapadera za makasitomala.
7.Zigawo za mbale zosindikizira ndizokongola komanso zokongola.Zisindikizo zosindikizira m'madera osiyanasiyana ogwira ntchito zamagulu a zipangizo zimatha kusungunuka kapena kutsegulidwa ndi kutsekedwa paokha, zomwe zimakhala zosavuta kugwiritsa ntchito.

Hot filament CVD zida ndi oyenera madipoziti zipangizo diamondi, kuphatikizapo woonda filimu ❖ kuyanika, kudzidalira filimu wandiweyani, microcrystalline ndi nanocrystalline diamondi, conductive diamondi, etc. Iwo makamaka ntchito kuvala zosagwira zoteteza ❖ kuyanika simenti zida kudula carbide, zipangizo semiconductor. monga silicon ndi silicon carbide, zokutira kutentha kwa zida, boron doped conductive diamond electrode, ozoni disinfection yamadzi a electrolytic kapena kuchimbudzi.