Ukadaulo wa Chemical Vapor Deposition (CVD) ndiukadaulo wopanga mafilimu womwe umagwiritsa ntchito kutentha, kukulitsa kwa plasma, kuthandizidwa ndi zithunzi ndi njira zina zopangira zinthu zagasi kutulutsa mafilimu olimba pagawo laling'ono laling'ono pogwiritsa ntchito mankhwala mokhazikika kapena motsika.
Nthawi zambiri, momwe reactant ndi gasi ndipo imodzi mwazinthuzo imakhala yolimba imatchedwa CVD reaction.Pali mitundu yambiri ya zokutira zokonzedwa ndi CVD reaction, makamaka mu semiconductor process.Mwachitsanzo, m'munda wa semiconductor, kuyengedwa kwa zipangizo zopangira, kukonzekera mafilimu apamwamba a semiconductor single crystal, ndi kukula kwa mafilimu a polycrystalline ndi amorphous, kuchokera ku zipangizo zamagetsi kupita kumagulu ophatikizika, zonse zimagwirizana ndi teknoloji ya CVD.Kuonjezera apo, mankhwala apamwamba a zipangizo amakondedwa ndi anthu.Mwachitsanzo, zida zosiyanasiyana monga makina, riyakitala, zakuthambo, zida zamankhwala ndi mankhwala zitha kugwiritsidwa ntchito pokonzekera zokutira zogwira ntchito ndi kukana dzimbiri, kukana kutentha, kukana kuvala ndi kulimbitsa pamwamba ndi njira yopangira filimu ya CVD malinga ndi zofunikira zawo zosiyanasiyana.
—— Nkhaniyi yafalitsidwa ndi Guangdong Zhenhua, wopangazida zokutira vacuum
Nthawi yotumiza: Mar-04-2023