1. Hollow cathode ion ❖ kuyanika makina ndi otentha waya arc ion ❖ kuyanika makina
Mfuti ya cathode yopanda phokoso ndi mfuti yotentha ya arc imayikidwa pamwamba pa chipinda chophikira, anode imayikidwa pansi, ndipo ma coil awiri a electromagnetic amaikidwa pamwamba ndi pansi pa chipinda chophikira. Arc kuwala ma elekitironi kumayenda kuchokera pamwamba mpaka pansi kuchita mozungulira mzere kuyenda.
2. Maginito osatha kuphatikiza kuwongolera kwamagetsi kwa gwero laling'ono lozungulira la cathode arc
Koyilo yamagetsi imafulumizitsa malo a arc kuti azitha kuyenda mozungulira mozungulira chandamale, zomwe zimachepetsa nthawi yokhala pamalo omwe akufunika, kumachepetsa gawo la dziwe losungunuka ndikuwongolera gulu la filimu.
3.Dual electromagnetic control cathodic arc source
Gwero la cathodic arc lili ndi ma coil awiri a electromagnetic, omwe amathandizira kuthamanga kwa ma elekitironi othamanga ndikuwongolera gulu la filimu.
4.Maginito Cyclotron PECVD
Ma coil awiri a electromagnetic amaikidwa kunja kwa chipinda chopaka cha DC PECVD kuti ma elekitironi azungulira, zomwe zimawonjezera mwayi wa kugundana pakati pa ma elekitironi ndi mpweya, komanso kumapangitsa kuti tinthu tating'onoting'ono tating'onoting'ono tambiri tiwonongeke.
5.ECR Microwave PECVD
Mu ❖ kuyanika chipinda kunja anaika chapamwamba ndi m'munsi ndi awiri maginito coils maginito, akhoza kusintha mlingo dissociation.
6.Arc Light Discharge PECVD
Mu arc kumaliseche PECVD zida ❖ kuyanika chipinda kuzungulira chapamwamba ndi m'munsi unsembe wa koyilo awiri amagetsi, mafunsidwe a diamondi filimu, ndi coaxial elekitironi kumunda akhoza zimayenda arc elekitironi otaya yotithandiza mpweya ionization wa hydrocarbon.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Oct-24-2023