PVD deposition luso wakhala akuchita kwa zaka zambiri monga latsopano pamwamba kusinthidwa teknoloji, makamaka vacuum ion ❖ kuyanika luso, amene apeza chitukuko chachikulu m'zaka zaposachedwapa ndipo tsopano chimagwiritsidwa ntchito pochiza zida, nkhungu, mphete pisitoni, magiya ndi zigawo zina. .Magiya okutidwa okonzedwa ndi ukadaulo wa vacuum ion wokutira amatha kuchepetsa kwambiri kugundana, kukonza anti-kuvala ndi anti-corrosion, ndipo akhala malo omwe amayang'ana kwambiri pa kafukufuku waukadaulo wolimbitsa magiya.
Zida zomwe zimagwiritsidwa ntchito popanga magiya makamaka ndi zitsulo zopangira, zitsulo zotayidwa, chitsulo chosungunuka, zitsulo zopanda chitsulo (mkuwa, aluminiyamu) ndi mapulasitiki.Zitsulo makamaka 45 zitsulo, 35SiMn, 40Cr, 40CrNi, 40MnB, 38CrMoAl.Chitsulo chochepa cha carbon chimagwiritsidwa ntchito makamaka mu 20Cr, 20CrMnTi, 20MnB, 20CrMnTo.Chitsulo chonyezimira chimagwiritsidwa ntchito kwambiri pamagiya chifukwa chakuchita bwino, pomwe zitsulo zotayidwa nthawi zambiri zimagwiritsidwa ntchito popanga magiya okhala ndi mainchesi> 400mm komanso mawonekedwe ovuta.Kuponyedwa zitsulo magiya odana ndi guluu ndi pitting kukana, koma kusowa mphamvu ndi kuvala kukana, makamaka ntchito khola, mphamvu si otsika liwiro kapena lalikulu kukula ndi mawonekedwe ovuta, akhoza kugwira ntchito pansi pa chikhalidwe cha kusowa kondomu, oyenera lotseguka. kufala.Zitsulo zopanda chitsulo zomwe zimagwiritsidwa ntchito nthawi zambiri ndi malata amkuwa, aluminiyamu-chitsulo mkuwa ndi aloyi wotayirira, zomwe zimagwiritsidwa ntchito popanga ma turbines kapena magiya, koma zinthu zotsetsereka komanso zolimbana ndi mikangano ndizosauka, zopepuka, zapakatikati komanso zotsika kwambiri. zida.Zida zopanda zitsulo zimagwiritsidwa ntchito makamaka m'magawo ena omwe ali ndi zofunikira zapadera, monga mafuta odzola opanda mafuta komanso kudalirika kwakukulu.Munda wa zinthu monga kuipitsidwa kochepa, monga zida zapakhomo, zida zamankhwala, makina azakudya ndi makina ansalu.
Zida zokutira zida
Zida za ceramic zaumisiri ndi zida zodalirika kwambiri zokhala ndi mphamvu zambiri komanso kuuma, makamaka kukana kutentha kwambiri, kutsika kwamafuta otsika komanso kukulitsa kwamafuta, kukana kuvala kwambiri komanso kukana kwa okosijeni.Kafukufuku wambiri wawonetsa kuti zida za ceramic ndizosagwira kutentha ndipo zimakhala zocheperako pazitsulo.Choncho, kugwiritsa ntchito zipangizo za ceramic m'malo mwa zitsulo zazitsulo zowonongeka zimatha kusintha moyo wa chigawo cha mikangano, chikhoza kukumana ndi kutentha kwapamwamba ndi zipangizo zamakono zowonongeka, zogwira ntchito zambiri ndi zina zovuta.Pakalipano, zida za ceramic zaumisiri zakhala zikugwiritsidwa ntchito popanga zida zothana ndi kutentha kwa injini, kufalikira kwamakina m'magawo ovala, zida zamankhwala m'zigawo zosagwira dzimbiri ndi zida zosindikizira, zomwe zikuwonetsa kugwiritsiridwa ntchito kwakukulu kwa zinthu zadothi zomwe zikuyembekezeka.
Mayiko otukuka monga Germany, Japan, United States, United Kingdom ndi mayiko ena amaona kufunika kwambiri kwa chitukuko ndi kugwiritsa ntchito zipangizo zoumba uinjiniya, kuyika ndalama zambiri ndi ogwira ntchito kukulitsa chiphunzitso processing ndi luso la zoumba uinjiniya.Germany yakhazikitsa pulogalamu yotchedwa "SFB442", yomwe cholinga chake ndi kugwiritsa ntchito ukadaulo wa PVD kupanga filimu yoyenera pamwamba pa zigawozo kuti zilowe m'malo mwa njira yopangira mafuta yomwe ingawononge chilengedwe komanso thupi la munthu.PW Gold ndi ena ku Germany adagwiritsa ntchito ndalama kuchokera ku SFB442 kuti agwiritse ntchito ukadaulo wa PVD kuyika mafilimu opyapyala pamwamba pa ma bearings ogubuduza ndipo adapeza kuti anti-wear performance of rolling bearings idakula bwino ndipo makanema omwe adayikidwa pamwamba amatha kulowa m'malo ntchito yamphamvu kwambiri anti-kuvala zowonjezera.Joachim, Franz et al.ku Germany adagwiritsa ntchito ukadaulo wa PVD pokonzekera mafilimu a WC/C owonetsa zinthu zabwino kwambiri zothana ndi kutopa, apamwamba kuposa mafuta odzola okhala ndi zowonjezera za EP, zomwe zimapatsanso mwayi wosintha zowonjezera zovulaza ndi zokutira.E. Lugscheider et al.ya Institute of Materials Science, Technical University of Aachen, Germany, ndi ndalama zochokera ku DFG (GermanResearch Commission), inasonyeza kuwonjezeka kwakukulu kwa kukana kutopa pambuyo poika mafilimu oyenerera pazitsulo za 100Cr6 pogwiritsa ntchito luso la PVD.Kuphatikiza apo, United States General Motors yayamba mu filimu yake ya VolvoS80Turbo ya mtundu wa galimoto yamagetsi kuti ipititse patsogolo kutopa kukana;kampani yotchuka ya Timken yakhazikitsa filimu yotchedwa ES200 gear surface;chizindikiro cholembetsedwa cha MAXIT gear chotchingira chawonekera ku Germany;Zizindikiro zolembetsedwa za Graphit-iC ndi Dymon-iC motsatana Zovala za Gear zokhala ndi zilembo zolembetsedwa za Graphit-iC ndi Dymon-iC zimapezekanso ku UK.
Monga zida zosinthira zamakina, magiya amagwira ntchito yofunika kwambiri pamakampani, chifukwa chake ndikofunikira kwambiri kuphunzira kugwiritsa ntchito zida za ceramic pamagiya.Pakalipano, zoumba zaumisiri zomwe zimagwiritsidwa ntchito pamagiya ndizotsatirazi.
1, TiN ❖ kuyanika wosanjikiza
1, TiN
Ion ❖ kuyanika TiN ceramic wosanjikiza ndi chimodzi mwa zinthu kwambiri ntchito pamwamba kusinthidwa zokutira ndi kuuma mkulu, mkulu adhesion mphamvu, otsika mikangano coefficient, zabwino dzimbiri kukana, etc. Chakhala chimagwiritsidwa ntchito m'madera osiyanasiyana, makamaka zida ndi nkhungu makampani.Chifukwa chachikulu chomwe chimakhudza kagwiritsidwe ntchito ka zokutira za ceramic pa magiya ndi vuto lolumikizana pakati pa zokutira za ceramic ndi gawo lapansi.Popeza momwe ma giya amagwirira ntchito ndizovuta kwambiri kuposa zida ndi nkhungu, kugwiritsa ntchito zokutira kumodzi kwa TiN pamankhwala amagetsi ndikoletsedwa kwambiri.Ngakhale zokutira za ceramic zili ndi ubwino wa kuuma kwakukulu, kutsika kwachitsulo chochepa komanso kukana kwa dzimbiri, ndizovuta komanso zovuta kupeza zokutira zokulirapo, kotero zimafunika kulimba kwakukulu ndi gawo lamphamvu lamphamvu kuti lithandizire kupaka kuti azitha kusewera mawonekedwe ake.Chifukwa chake, zokutira za ceramic zimagwiritsidwa ntchito kwambiri pa carbide ndi chitsulo chothamanga kwambiri.Zida zamagiya ndizofewa poyerekeza ndi zida za ceramic, ndipo kusiyana pakati pa mawonekedwe a gawo lapansi ndi zokutira ndi kwakukulu, kotero kuphatikiza kwa zokutira ndi gawo lapansi kumakhala kovutirapo, ndipo zokutira sikokwanira kuthandizira zokutira, kupanga. ❖ kuyanika kosavuta kugwa pogwiritsira ntchito, sikungangosewera ubwino wa zokutira za ceramic, koma particles zokutira za ceramic zomwe zimagwa zidzachititsa kuti abrasive avale pa gear, ndikufulumizitsa kutayika kwa zida.Yankho laposachedwa ndikugwiritsa ntchito ukadaulo wamankhwala ophatikizika kuti apititse patsogolo mgwirizano pakati pa ceramic ndi gawo lapansi.Ukadaulo wamankhwala ophatikizika pamwamba umatanthawuza kuphatikizika kwa zokutira kwa nthunzi ndi njira zina zochizira pamwamba kapena zokutira, kugwiritsa ntchito magawo awiri / malo ocheperako kuti asinthe pamwamba pa gawo lapansi kuti apeze zida zamakina zomwe sizingakwaniritsidwe ndi njira imodzi yokha yochizira. .Zopaka zophatikizika za TiN zoyikidwa ndi ion nitriding ndi PVD ndi chimodzi mwazopaka zofufuzidwa kwambiri.Gawo la plasma nitriding ndi zokutira zophatikizika za TiN ceramic zili ndi chomangira cholimba ndipo kukana kovala kumakula kwambiri.
Kukula koyenera kwa wosanjikiza wa filimu wa TiN wokhala ndi kukana kovala bwino komanso kulumikizana koyambira ndi filimu kumakhala pafupifupi 3 ~ 4μm.Ngati makulidwe a filimu wosanjikiza ndi osachepera 2μm, kukana kuvala sikudzakhala bwino kwambiri.Ngati makulidwe a filimu wosanjikiza ndi oposa 5μm, filimu maziko kugwirizana adzakhala utachepa.
2、Multi-wosanjikiza, multicomponent TiN zokutira
Ndi kugwiritsa ntchito zokutira kwa TiN pang'onopang'ono komanso kufalikira, pali kafukufuku wochulukirapo wamomwe mungawongolere ndikuwongolera zokutira za TiN.M'zaka zaposachedwa, zokutira zamitundu yambiri ndi zokutira zambiri zapangidwa kutengera zokutira za binary za TiN, monga Ti-CN, Ti-CNB, Ti-Al-N, Ti-BN, (Tix,Cr1-x)N, TiN. / Al2O3, etc. Powonjezera zinthu monga Al ndi Si ku zokutira za TiN, kukana kutentha kwa okosijeni ndi kuuma kwa zokutira kumatha kusintha, pamene kuwonjezera zinthu monga B kungapangitse kuuma ndi kumamatira kwamphamvu kwa zokutira.
Chifukwa cha zovuta zamagulu ambiri, pali mikangano yambiri mu phunziroli.Pakufufuza kwa (Tix,Cr1-x)N zokutira zambirimbiri, pali kutsutsana kwakukulu pazotsatira za kafukufuku.Anthu ena amakhulupirira kuti (Tix,Cr1-x)N zokutira zimatengera TiN, ndipo Cr ikhoza kukhalapo ngati njira yosinthira yolimba mu matrix a TiN dot, koma osati ngati gawo losiyana la CrN.Kafukufuku wina amasonyeza kuti chiwerengero cha ma atomu a Cr omwe amalowetsa mwachindunji ma atomu a Ti mu (Tix,Cr1-x)N zokutira ndizochepa, ndipo Cr yotsalayo ilipo mu singlet state kapena mafomu opangidwa ndi N. Zotsatira zoyesera zimasonyeza kuti kuwonjezera kwa Cr ku zokutira kumachepetsa kukula kwa tinthu tating'onoting'ono ndikuwonjezera kuuma, ndipo kuuma kwa ❖ kuyanika kumafika pamtengo wake wapamwamba kwambiri pamene kuchuluka kwa Cr kumafika 3l%, koma kupsinjika kwamkati kwa ❖ kuyanika kumafikanso pamtengo wake waukulu.
3. Zina zokutira wosanjikiza
Kuphatikiza pa zokutira zomwe zimagwiritsidwa ntchito nthawi zambiri za TiN, zida zambiri zamauinjiniya zimagwiritsidwa ntchito polimbitsa zida zapamtunda.
(1)Y.Terauchi et al.waku Japan adaphunzira za kukana kuvala kwa titanium carbide kapena titaniyamu nitride ceramic magiya osungidwa ndi njira yoyika nthunzi.Magiya anali opangidwa ndi carburized ndi opukutidwa kuti afikire kuuma kwapamtunda kwa pafupifupi HV720 ndi kuuma kwa pamwamba kwa 2.4 μm asanakutidwe, ndipo zokutira za ceramic zidakonzedwa ndi mankhwala a vapor deposition (CVD) a titanium carbide komanso poyika nthunzi (PVD) titaniyamu nitride, yokhala ndi filimu ya ceramic makulidwe pafupifupi 2 μm.Zovala zokangana zidafufuzidwa pamaso pa mafuta ndi kukangana kowuma, motsatana.Zinapezeka kuti kukana kwa galling ndi kukana kukanika kwa zida za gear zidakulitsidwa kwambiri atakutidwa ndi ceramic.
(2) Kupaka kophatikizika kwa Ni-P okutidwa ndi mankhwala ndi TiN kunakonzedwa ndi kuyikapo Ni-P ngati gawo losinthira ndikuyika TiN.Kafukufukuyu akuwonetsa kuti kuuma kwapamtunda kwa zokutira zophatikizika kumeneku kwasinthidwa pang'onopang'ono, ndipo zokutira zimalumikizidwa bwino ndi gawo lapansi ndipo zimakhala bwino kukana kuvala.
(3) WC/C, B4C filimu woonda
M. Murakawa et al., Department of Mechanical Engineering, Japan Institute of Technology, anagwiritsa ntchito luso la PVD kuyika filimu yopyapyala ya WC/C pamwamba pa magiya, ndipo moyo wake wautumiki unali wowirikiza katatu kuposa wa magiya wamba ozimitsidwa ndi pansi pansi pa mafuta- zokometsera zaulere.Franz J ndi al.adagwiritsa ntchito ukadaulo wa PVD kuyika filimu yopyapyala ya WC/C ndi B4C pamwamba pa magiya a FEZ-A ndi FEZ-C, ndipo kuyesako kunawonetsa kuti kuyanika kwa PVD kumachepetsa kugunda kwa zida, kupangitsa kuti giyayo isavutike ndi gluing kapena gluing, ndi kupititsa patsogolo mphamvu yonyamula katundu wa giya.
(4) Mafilimu a CrN
Mafilimu a CrN ndi ofanana ndi mafilimu a TiN chifukwa ali ndi kuuma kwakukulu, ndipo mafilimu a CrN sagonjetsedwa ndi kutentha kwa okosijeni kwambiri kuposa TiN, ali ndi kukana kwa dzimbiri, kutsika kwapakati mkati kuposa mafilimu a TiN, komanso kulimba bwinoko.Chen Ling et adakonza filimu yosakanikirana ya TiAlCrN/CrN yokhala ndi mgwirizano wabwino kwambiri wopangidwa ndi filimu pamwamba pa HSS, ndipo adaperekanso lingaliro la dislocation stacking ya filimu ya multilayer, ngati kusiyana kwa mphamvu pakati pa zigawo ziwiri ndi kwakukulu, kusuntha kukuchitika. mu wosanjikiza kudzakhala kovuta kuwoloka mawonekedwe ake mu wosanjikiza ena, motero kupanga dislocation stacking pa mawonekedwe ndi kusewera udindo kulimbikitsa zakuthupi.Zhong Bin et adaphunzira momwe nayitrogeni imakhudzidwira pamapangidwe agawo komanso mawonekedwe ovala osagwirizana a makanema a CrNx, ndipo kafukufukuyu adawonetsa kuti kuchuluka kwapang'onopang'ono kwa Cr2N (211) m'mafilimu kunachepa pang'onopang'ono ndipo nsonga ya CrN (220) idakula pang'onopang'ono ndikuwonjezeka. Pazinthu za N2, tinthu tating'onoting'ono tambiri tambiri tambiri timachepa pang'onopang'ono ndipo pamwamba pamakhala kukhala lathyathyathya.Pamene mpweya wa N2 unali 25 ml / min (chomwe chimachokera ku arc panopa chinali 75 A, filimu ya CrN yosungidwa ili ndi khalidwe labwino, kuuma kwabwino komanso kukana kuvala bwino pamene N2 aeration ndi 25ml / min (chomwe chimachokera arc panopa ndi 75A, zoipa. kuthamanga ndi 100V).
(5) Kanema wovuta kwambiri
Kanema wa Superhard ndi filimu yolimba yolimba kuposa 40GPa, kukana kovala bwino, kukana kutentha kwambiri komanso kugundana kocheperako komanso kuchuluka kwamafuta ochepa, makamaka filimu ya diamondi ya amorphous ndi filimu ya CN.Mafilimu a diamondi amorphous ali ndi katundu wa amorphous, alibe mawonekedwe otalika, ndipo ali ndi chiwerengero chachikulu cha CC tetrahedral bonds, choncho amatchedwanso mafilimu a tetrahedral amorphous carbon.Monga mtundu wa filimu ya carbon amorphous, zokutira ngati diamondi (DLC) zili ndi zinthu zambiri zabwino kwambiri zofanana ndi diamondi, monga kutsekemera kwapamwamba kwambiri, kuuma kwakukulu, modulus yotanuka kwambiri, kutsika kwapakati pa kukula kwa matenthedwe, kukhazikika kwa mankhwala, kukhazikika kwabwino kwa mankhwala, kukana kuvala bwino ndi kugunda kotsika kokwana.Zasonyezedwa kuti kupaka mafilimu ngati diamondi pamalo opangira zida kumatha kukulitsa moyo wautumiki ndi gawo la 6 ndikuwongolera kwambiri kukana kutopa.Mafilimu a CN, omwe amadziwikanso kuti mafilimu a amorphous carbon-nitrogen, ali ndi mawonekedwe a crystal ofanana ndi a β-Si3N4 covalent compounds ndipo amadziwikanso kuti β-C3N4.Liu ndi Cohen et al.adachita kuwerengera mozama mozama pogwiritsa ntchito mawerengedwe a pseudopotential band kuchokera ku mfundo yachirengedwe choyambirira, adatsimikizira kuti β-C3N4 ili ndi mphamvu yayikulu yomangirira, makina okhazikika, gawo limodzi lokhazikika litha kukhalapo, ndipo modulus yake yotanuka imafanana ndi diamondi, yokhala ndi zinthu zabwino, zomwe zimatha kusintha kuuma kwapamwamba komanso kuvala kukana kwa zinthuzo ndikuchepetsa kugundana kwapakati.
(6) Zosanjikiza zina za aloyi zosagwira ntchito
Zovala zina zosagwirizana ndi aloyi zayesedwanso kuti zigwiritsidwe pa magiya, mwachitsanzo, kuyika kwa Ni-P-Co aloyi wosanjikiza pa dzino pamwamba pa 45 # zitsulo zitsulo ndi aloyi wosanjikiza kuti apeze kopitilira muyeso wa tirigu bungwe, zomwe zimatha kuwonjezera moyo mpaka nthawi 1.144 ~ 1.533.Zaphunziridwanso kuti Cu-zitsulo wosanjikiza ndi Ni-W aloyi ❖ kuyanika ntchito pa dzino pamwamba pa Cu-Cr-P aloyi kuponyedwa zida zachitsulo kupititsa patsogolo mphamvu zake;Ni-W ndi Ni-Co aloyi ❖ kuyanika ntchito pa dzino pamwamba pa HT250 zida chitsulo choponyedwa bwino kukana kuvala ndi 4 ~ 6 nthawi poyerekeza ndi giya wokutidwa.
Nthawi yotumiza: Nov-07-2022