Kuyamba kwa vacuum nthunzi kuyika, sputtering ndi kupaka ion

Kupaka kwa vacuum kumaphatikizapo kuyika kwa nthunzi wa vacuum, zokutira zotayira ndi zokutira ion, zomwe zimagwiritsidwa ntchito kuyika mafilimu osiyanasiyana achitsulo ndi osakhala achitsulo pamwamba pazigawo zapulasitiki ndi distillation kapena sputtering pansi pa vacuum, zomwe zimatha kupeza zokutira zowonda kwambiri. ndi mwayi wapadera womatira mwachangu, koma mtengo wake ndi wapamwamba, ndipo mitundu yazitsulo zomwe zimatha kuyendetsedwa ndizochepa, ndipo nthawi zambiri zimagwiritsidwa ntchito popaka ntchito zamagulu apamwamba.

Vacuum nthunzi mafunsidwe ndi njira Kutenthetsa zitsulo pansi pa vacuum mkulu, kupangitsa kusungunuka, nthunzi, ndi kupanga filimu woonda zitsulo pamwamba pa chitsanzo pambuyo kuzirala, ndi makulidwe a 0.8-1.2 um.Imadzaza kagawo kakang'ono kakang'ono ndi kotukuka pamwamba pa chinthucho kuti ipeze mawonekedwe ngati galasi. iyenera kuphimbidwa.

Kupopera nthawi zambiri kumatanthauza kupopera kwa magnetron, komwe ndi njira yothamanga kwambiri yotsika kutentha.Njirayi imafunikira mpweya wa 1 × 10-3Torr, womwe ndi 1.3 × 10-3Pa malo opanda mpweya wodzazidwa ndi mpweya wa argon (Ar), ndi pakati pa gawo lapansi la pulasitiki (anode) ndi chandamale chachitsulo (cathode) kuphatikiza mphamvu yayikulu. pakali pano, chifukwa cha electron excitation wa inert mpweya kwaiye ndi kuwala kukhetsa, kutulutsa plasma, plasma kuphulika kunja maatomu chandamale zitsulo ndi madipoziti pa gawo lapansi pulasitiki.Zovala zambiri zachitsulo zimagwiritsa ntchito kupopera kwa DC, pomwe zida za ceramic zosagwiritsa ntchito zimagwiritsa ntchito RF AC sputtering.

Kupaka kwa ion ndi njira yomwe kukhetsa kwa gasi kumagwiritsidwa ntchito kuti asungunuke pang'ono gasi kapena zinthu zomwe zimatuluka mumtambo, ndipo zinthu zomwe zimatuluka nthunzi kapena zotulutsa zake zimayikidwa pagawo laling'ono pophulitsa ma ion gasi kapena ma ion a chinthu chomwe chatuluka.Izi zikuphatikizapo zokutira za magnetron sputtering ion, zokutira ion zokhazikika, zokutira za ion zotulutsa cathode (njira yopangira mpweya wa cathode), ndi zokutira za ma arc ion (zophimba cathode arc ion).

Oima mbali ziwiri maginito sputtering mosalekeza ❖ kuyanika mu mzere
Kugwiritsidwa ntchito kwakukulu, kumatha kugwiritsidwa ntchito pazinthu zamagetsi monga zolemba zotchingira zipolopolo za EMI zotchingira, zinthu zathyathyathya, komanso zinthu zonse za kapu ya nyali zomwe zili mumsinkhu winawake zimatha kupangidwa.Kukweza kwakukulu, kutsekereza kophatikizika ndi kukanikizira kotsamira kwa makapu opepuka opaka mbali ziwiri, omwe amatha kukweza kwambiri.Ubwino wokhazikika, kusasinthasintha kwabwino kwa filimu yosanjikiza kuchokera pagulu kupita pagulu.Madigiri apamwamba a automation komanso mtengo wotsika wantchito.