Mau Oyamba a Njira Zachizolowezi Zoyika Zotilira Zolimba

1. Thermal CVD luso

Zotchingira zolimba nthawi zambiri zimakhala zokutira zachitsulo za ceramic (TiN, etc.), zomwe zimapangidwa ndi zomwe zitsulo zimachita pakupaka ndi kutulutsa mpweya.Poyamba, ukadaulo wamatenthedwe wa CVD udagwiritsidwa ntchito popereka mphamvu yolumikizirana ndi mphamvu yamafuta pa kutentha kwakukulu kwa 1000 ℃.Kutentha kumeneku ndikoyenera kuyika TiN ndi zokutira zina zolimba pazida zomata za carbide.Pakadali pano, ikadali ukadaulo wofunikira kuyika zokutira zophatikizika za TiN-Al20 pamitu ya zida za carbide.

2. Kupaka kwa ayoni wa cathode ndi kuyanika kwa waya wotentha wa arc

M'zaka za m'ma 1980, zokutira za cathode ion ndi zokutira za waya otentha zidagwiritsidwa ntchito kuyika zida zodulira.Matekinoloje onse awiriwa ndi matekinoloje opaka ma ion a arc, okhala ndi chitsulo chachitsulo mpaka 20% ~ 40%.

3. Cathode arc ion zokutira

Kutuluka kwa zokutira kwa cathodic arc ion kwadzetsa chitukuko chaukadaulo woyika zokutira zolimba pa nkhungu.Mlingo wa ionization wa zokutira cathodic arc ion ndi 60% ~ 90%, kulola ma ayoni ambiri achitsulo ndi ma ion gasi amafika pamwamba pa workpiece ndikukhalabe ndi ntchito yayikulu, zomwe zimapangitsa kuti pakhale mawonekedwe komanso mapangidwe a zokutira zolimba monga. TiN.Pakalipano, teknoloji yokutira ya cathodic arc ion imagwiritsidwa ntchito makamaka kuyika zokutira zolimba pa nkhungu.

Gwero la cathode arc ndi gwero lokhazikika la evaporation lopanda dziwe losungunuka lokhazikika, ndipo malo a arc gwero amatha kuyikidwa mosasamala, kupititsa patsogolo kuchuluka kwa kagwiritsidwe ntchito ka chipinda chophikira ndikuwonjezera mphamvu yodzaza ng'anjo.Mawonekedwe a magwero a cathode arc amaphatikizapo magwero ang'onoang'ono ozungulira a cathode arc, magwero a arc columnar, ndi ma rectangular flat arc magwero akulu.Zigawo zosiyanasiyana za magwero ang'onoang'ono a arc, magwero a columnar arc, ndi magwero akuluakulu a arc amatha kukonzedwa padera kuti asungire mafilimu amitundu yambiri ndi mafilimu a nano multilayer.Pakadali pano, chifukwa cha kuchuluka kwa zitsulo zazitsulo za cathodic arc ion zokutira, ma ion achitsulo amatha kuyamwa mpweya wochulukirapo, zomwe zimapangitsa kuti pakhale njira zambiri komanso ntchito yosavuta kuti mupeze zokutira zabwino kwambiri.Komabe, pali madontho owoneka bwino mu microstructure ya zokutira wosanjikiza zomwe zimapezedwa ndi zokutira za cathodic arc ion.M'zaka zaposachedwa, matekinoloje ambiri atsopano adawonekera kuti akonzenso mawonekedwe a filimuyo, yomwe yasintha bwino filimu yophimba arc ion.

——Nkhaniyi yatulutsidwa ndi Guangdong Zhenhua Technology, awopanga makina opaka utoto.