Mayendedwe a Makina Oyatira a Sputtering

1. Bombardment kuyeretsa gawo lapansi

1.1) Makina opaka utoto amagwiritsa ntchito kutulutsa kowala kuyeretsa gawo lapansi.Izi zikutanthauza kuti, perekani mpweya wa argon m'chipinda, voteji yotulutsa ili pafupi ndi 1000V, Pambuyo poyatsa magetsi, kutulutsa kowala kumapangidwa, ndipo gawo lapansi limatsukidwa ndi bomba la argon ion.

1.2) M'makina opaka sputtering omwe amapangidwa m'mafakitale zodzikongoletsera zapamwamba, ma ion titaniyamu otulutsidwa ndi magwero ang'onoang'ono a arc amagwiritsidwa ntchito kwambiri kuyeretsa.Makina opaka sputtering ali ndi kagwero kakang'ono ka arc, ndipo titaniyamu ion mtsinje mu arc plasma wopangidwa ndi kutulutsa kakang'ono ka arc gwero amagwiritsidwa ntchito kuphulitsa ndikuyeretsa gawo lapansi.

2. Titaniyamu nitride zokutira

Mukayika titaniyamu nitride mafilimu opyapyala, chinthu chomwe mukufuna kuti mulawe ndi chandamale cha titaniyamu.Chandamale chandamale chikugwirizana ndi electrode negative wa sputtering magetsi, ndi chandamale voteji ndi 400 ~ 500V;The argon flux imakhazikika, ndipo chowongolera chowongolera ndi (3 ~ 8) x10^-1PA.Gawo laling'ono limalumikizidwa ndi electrode yoyipa yamagetsi okondera, ndi voliyumu ya 100 ~ 200V.

Pambuyo poyatsa mphamvu ya sputtering titaniyamu chandamale, kuwala kumatulutsa, ndipo ma argon amphamvu kwambiri amawombera chandamale, kutulutsa maatomu a titaniyamu kuchokera pa chandamalecho.

Zomwe mpweya wa nayitrogeni umayambitsidwa, ndipo maatomu a titaniyamu ndi nayitrogeni amalowetsedwa mu ma ion titaniyamu ndi ayoni wa nayitrogeni muchipinda chophimba.Pansi pa kukopa kwa zoipa kukondera magetsi kumunda ntchito gawo lapansi, ayoni titaniyamu ndi ayoni nayitrogeni imathandizira pamwamba pa gawo lapansi chifukwa mankhwala anachita ndi mafunsidwe kupanga titaniyamu nitride filimu wosanjikiza.

3. Chotsani gawo lapansi

Mukafika pa makulidwe a filimu yomwe munakonzeratu, zimitsani mphamvu ya sputtering, gawo laling'ono la gawo lapansi, ndi gwero la mpweya.Kutentha kwa gawo lapansi kukakhala kochepera 120 ℃, dzazani chipindacho ndi mpweya ndikuchotsa gawo lapansi.

Nkhaniyi yasindikizidwa ndimagnetron sputtering zokutira makina opanga makina– Guangdong Zhenhua.