Njira yopangira zokutira za cathode ion

Njira yopangira zokutira za cathode ion ndi motere:

1, Ikani ma Chin ingots pakugwa.

2, Kuyika workpiece.

3, Pambuyo pochoka ku 5 × 10-3Pa, mpweya wa argon umalowetsedwa m'chipinda chotchingira kuchokera ku chubu lasiliva, ndipo mulingo wa vacuum uli mozungulira 100Pa.

4, Yatsani mphamvu yokondera.

5, Pambuyo kuyatsa mphamvu ya arc kuyatsa kutulutsa kwa dzenje la cathode. Kutulutsa kowala kumapangidwa mu chubu la batani, Kutulutsa voteji ndi 800 ~ 1000V, The arc-rasing current ndi 30 ~ 50A. Chifukwa cha dzenje cathode zotsatira za kuwala. kutulutsa, kutulutsa kowala kwambiri, kachulukidwe kakang'ono ka makoswe mu chubu cha siliva amaphulitsa khoma la chubu cha vantage, Pangani chubu cha chubu chitenthetsere mpaka kutuluka kwa ma elekitironi, njira yotulutsira kuchokera pakutulutsa kowala kusintha kwadzidzidzi kupita. arc discharge, Voltage ndi 40 ~ 70V, Current ndi 80 ~ 300A.Silver chubu kutentha kufika pamwamba 2300K, Incandescent, Imatulutsa mkulu osalimba mtsinje wa ma elekitironi arc kuchokera chubu, ndi kuwombera kwa anode.

6, Kusintha kwa vacuum level.The vacuum level for light discharge ku dzenje cathode mfuti ndi za 100 Pa,Ndipo zingalowe digiri ❖ kuyanika ndi 8×10-1 ~ 2Pa.Choncho, Pambuyo poyatsira arc kumaliseche, kuchepetsa ukubwera argon. gasi posachedwa, Sinthani mulingo wa vacuum kukhala osiyanasiyana oyenera kupaka.

7, Titaniyamu yokutidwa m'munsi layer.Electron kuyenda pa anodically anakomoka Chin zitsulo ingot, Kutembenuka kwa mphamvu kinetic kuti matenthedwe mphamvu, Evaporation wa Chin zitsulo ndi Kutentha, nthunzi maatomu kufika workpiece kupanga titaniyamu filimu.

8, Kuyika kwa TiN.Nayitrogeni mpweya amaperekedwa kwa ❖ kuyanika chipinda, nayitrojeni mpweya ndi maatomu chamunthuyo ndi ionized mu asafe ndi titaniyamu ayoni.Pamwamba pa crucible,Kutheka Higher kugunda inelastic wa titaniyamu nthunzi maatomu ndi wandiweyani mitsinje ya otsika mphamvu ma elekitironi, The zitsulo dissociation mlingo ndi mkulu monga 20% ~ 40%., Titaniyamu ayoni amatha kuchita mankhwala ndi zimene mpweya nayitrogeni, Kuika kupeza nitride chofunda filimu wosanjikiza.The dzenje cathode mfuti zonse vaporization gwero, Gwero lina wa ionization.Panthawi yopaka,Pakalipano ya koyilo yamagetsi yozungulira crucible iyeneranso kusinthidwa,Yang'anani mtengo wa elekitironi pakatikati pakugwa,Motero, kuchuluka kwamphamvu kwa ma electron kumawonjezeka.

9, Mphamvu Off. Pambuyo filimu makulidwe kufika anakonzeratu filimu makulidwe, Zimitseni arc mphamvu, Kukondera magetsi ndi kotunga mpweya.