Zaukadaulo za vacuum magnetron sputtering zida zokutira

Vuto la magnetron sputtering ndiloyenera makamaka zokutira zokhazikika.M'malo mwake, njirayi imatha kuyika makanema owonda amtundu uliwonse wa oxide, carbide, ndi nitride.Kuphatikiza apo, njirayi ndiyoyeneranso kuyika mawonekedwe amitundu yambiri, kuphatikiza mapangidwe owoneka bwino, mafilimu amitundu, zokutira zosagwira, ma nano-laminates, zokutira zapamwamba kwambiri, mafilimu oteteza, etc. Kale mu 1970, filimu yowoneka bwino yapamwamba kwambiri. zitsanzo zoyikapo zapangidwa kuti zigwiritsidwe ntchito pamitundu yosiyanasiyana ya filimu ya kuwala.Zidazi zikuphatikiza zinthu zowoneka bwino, ma semiconductors, ma polima, ma oxide, ma carbides, ndi nitrides, pomwe ma fluoride amagwiritsidwa ntchito ngati zokutira za evaporative.

Ubwino waukulu wa magnetron sputtering ndondomeko ntchito zotakasika kapena sanali zotakasika ❖ kuyanika njira kusungitsa zigawo za zipangizo ndi bwino kulamulira wosanjikiza zikuchokera, filimu makulidwe, filimu makulidwe ofanana ndi mawotchi katundu wosanjikiza.Njirayi ili ndi zizindikiro zotsatirazi.

1, Mtengo waukulu woperekedwa.Chifukwa cha ntchito ma elekitirodi mkulu-liwiro maginito, lalikulu ion otaya akhoza analandira, bwino kuwongolera mafunsidwe mlingo ndi sputtering mlingo wa ndondomeko ❖ kuyanika.Poyerekeza ndi njira zina zokutira sputtering, magnetron sputtering ali mkulu mphamvu ndi zokolola mkulu, ndipo chimagwiritsidwa ntchito zosiyanasiyana kupanga mafakitale.

2, Mphamvu yapamwamba kwambiri.Magnetron sputtering target nthawi zambiri amasankha voteji mkati mwa 200V-1000V, nthawi zambiri imakhala 600V, chifukwa voteji ya 600V ili mkati mwa mphamvu zopambana kwambiri.

3. Mphamvu yochepa ya sputtering.Magnetron chandamale voteji ntchito otsika, ndi maginito munda confines madzi a m'magazi pafupi cathode, amene amalepheretsa apamwamba mphamvu mlandu particles kuti anapezerapo pa gawo lapansi.

4, Low gawo lapansi kutentha.Anode angagwiritsidwe ntchito kutsogolera kutali ma elekitironi kwaiye pa kukhetsa, palibe kufunika gawo lapansi thandizo kumaliza, amene angathe kuchepetsa ma elekitironi bombardment wa gawo lapansi.Choncho kutentha kwa gawo lapansi kumakhala kochepa, komwe kuli koyenera kwambiri kwa magawo ena apulasitiki omwe sagonjetsedwa kwambiri ndi kutentha kwakukulu.

5, Magnetron sputtering chandamale pamwamba etching si yunifolomu.Magnetron sputtering chandamale chandalama chandalama chimayamba chifukwa cha mphamvu ya maginito yosagwirizana.Malo omwe mulingo wazomwe mukufuna kuwongolera ndiwokulirapo, kotero kuti kugwiritsa ntchito bwino kwa zomwe mukufuna kukhale kochepa (20-30% yokha yogwiritsira ntchito).Chifukwa chake, kuti mugwiritse ntchito chandamale, kugawa kwa maginito kumafunika kusinthidwa ndi njira zina, kapena kugwiritsa ntchito maginito omwe akuyenda mu cathode kumathanso kupititsa patsogolo kagwiritsidwe ntchito ka chandamale.

6, Zolinga zophatikizika.Akhoza kupanga gulu chandamale ❖ kuyanika aloyi filimu.Pakali pano, kugwiritsa ntchito magnetron chandamale sputtering ndondomeko wakhala bwinobwino TA-Ti aloyi, (Tb-Dy) -Fe ndi Gb-Co aloyi filimu.Zolinga zophatikizika zili ndi mitundu inayi, motsatana, ndi chandamale chozungulira, chandamale chopindika, chandamale chaching'ono chomangika ndi chandamale cha magawo.Kugwiritsiridwa ntchito kwa dongosolo lachindunji la gawoli ndikwabwinoko.

7. Ntchito zosiyanasiyana.Magnetron sputtering process imatha kuyika zinthu zambiri, zodziwika bwino ndi izi: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti , Zr, SiO, AlO, GaAs, U, W, SnO, etc.

Magnetron sputtering ndi imodzi mwazinthu zomwe zimagwiritsidwa ntchito kwambiri kuti mupeze mafilimu apamwamba kwambiri.Ndi cathode yatsopano, imakhala ndi kugwiritsidwa ntchito kwakukulu komanso kutsika kwakukulu.Guangdong Zhenhua Technology vacuum magnetron sputtering ❖ kuyanika ndondomeko tsopano chimagwiritsidwa ntchito ❖ kuyanika zigawo zikuluzikulu dera.Njirayi sikuti imangogwiritsidwa ntchito pakupanga filimu yamtundu umodzi, komanso kupaka filimu yamitundu yambiri, kuwonjezera apo, imagwiritsidwanso ntchito mu mpukutuwo kuti igubuduze njira yopangira ma CD, filimu ya kuwala, lamination ndi zokutira zina.