Njira ya Small Arc Source Ion Coating

Njira yopangira cathodic arc source ion ion coating ndiyofanana ndi matekinoloje ena opaka, ndipo ntchito zina monga kuyika zida zogwirira ntchito ndi kupukuta sizikubwerezedwanso.

1.Bombardment kuyeretsa kwa workpieces

Musanayambe kupaka, mpweya wa argon umalowetsedwa m'chipinda chokhalamo ndi 2 × 10-2Pa.

Yatsani mphamvu ya pulse bias, ndi ntchito yozungulira 20% ndi kukondera kwa 800-1000V.

Mphamvu ya arc ikatsegulidwa, kutulutsa kozizira kwa arc kuwala kumapangidwa, komwe kumatulutsa kuchuluka kwa electron panopa ndi titaniyamu ion panopa kuchokera ku arc source, kupanga plasma yochuluka kwambiri.The titaniyamu ayoni Imathandizira jekeseni wake workpiece pansi pa zoipa mkulu kukondera kukakamizidwa ntchito workpiece, bombarding ndi sputtering otsala mpweya ndi zoipitsa adsorbed padziko workpiece, ndi kuyeretsa ndi kuyeretsa pamwamba pa workpiece;Pa nthawi yomweyo, mpweya chlorine mu chipinda ❖ kuyanika ndi ionized ndi ma elekitironi, ndi ayoni argon imathandizira bombardment wa workpiece pamwamba.

Chifukwa chake, kuyeretsa kwa bombardment ndikwabwino.Pafupifupi mphindi imodzi yokha yotsuka bombardment ingathe kuyeretsa chogwirira ntchito, chomwe chimatchedwa "main arc bombardment".Chifukwa cha kuchuluka kwa ayoni a titaniyamu, ngati gwero laling'ono la arc limagwiritsidwa ntchito pobomba ndikuyeretsa chogwiriracho kwa nthawi yayitali, kutentha kwa workpiece kumakhala kotentha kwambiri, ndipo m'mphepete mwa chida ungakhale wofewa.Nthawi zambiri, magwero ang'onoang'ono amayatsidwa chimodzi kuchokera pamwamba mpaka pansi, ndipo gwero lililonse laling'ono limakhala ndi nthawi yoyeretsa bombardment pafupifupi mphindi imodzi.

(1) Kupaka titaniyamu pansi wosanjikiza

Pofuna kukonza kugwirizana pakati pa filimuyo ndi gawo lapansi, gawo lapansi loyera la titaniyamu nthawi zambiri limakutidwa musanaphike titaniyamu nitride.Sinthani zingalowe mulingo 5 × 10-2-3 × 10-1Pa, kusintha workpiece kukondera voteji kuti 400-500V, ndi kusintha ntchito mkombero wa zimachitika kukondera mphamvu kotunga 40% ~ 50%.Ndikuyatsabe magwero ang'onoang'ono a arc imodzi ndi imodzi kuti atulutse madzi ozizira.Chifukwa cha kuchepa kwa voteji zoipa kukondera workpiece, mphamvu ya titaniyamu ayoni amachepetsa.Akafika workpiece, zotsatira sputtering ndi zochepa mafunsidwe tingati, ndi titaniyamu kusintha wosanjikiza aumbike pa workpiece kusintha mphamvu yomangira pakati pa titaniyamu nitride zovuta filimu wosanjikiza ndi gawo lapansi.Njirayi ndi njira yowotchera chogwirira ntchito.Pamene cholinga chenicheni cha titaniyamu chatulutsidwa, kuwala kwa plasma kumakhala kobiriwira.

1.Ammoniated mbale zolimba filimu zokutira

Sinthani digiri ya vacuum kukhala 3 × 10^-1-5Pa, kusintha workpiece kukondera voteji kuti 100-200V, ndi kusintha ntchito mkombero wa zimachitika kukondera mphamvu magetsi 70% ~ 80%.Nayitrogeni atayambitsidwa, titaniyamu imaphatikizana ndi arc discharge plasma kuyika titanium nitride hard film.Panthawi imeneyi, kuwala kwa plasma m'chipinda chopulumutsira kumakhala kofiira kwambiri.Ngati C₂H₂, O₂, ndi zina zimayambitsidwa, TiCN, TiO₂, etc. filimu zigawo zikhoza kupezeka.

-Nkhaniyi idatulutsidwa ndi Guangdong Zhenhua, awopanga makina opangira vacuum