Kutsitsimutsa ndi Kupititsa patsogolo Kupaka kwa Vacuum Sputtering

Sputtering ndi chodabwitsa chomwe ma particles amphamvu (kawirikawiri ma ion abwino a mpweya) amagunda pamwamba pa chinthu cholimba (pansipa chomwe chimatchedwa chandamale), kuchititsa maatomu (kapena mamolekyu) pamwamba pa zinthu zomwe chandamale kuti atulukemo.

Chodabwitsa ichi chinapezedwa ndi Grove mu 1842 pamene zinthu za cathode zinasamutsidwa ku khoma la chubu cha vacuum panthawi yoyesera kuti aphunzire kuwonongeka kwa cathodic. Izi sputtering njira mu gawo lapansi mafunsidwe a mafilimu woonda anapezeka mu 1877, chifukwa ntchito njira mafunsidwe a mafilimu woonda mu magawo oyambirira a mlingo sputtering ndi otsika, wosakwiya filimu liwiro, ayenera kukhazikitsidwa mu chipangizo cha mkulu-anzanu ndi kudutsa mu affective mpweya ndi zina mndandanda wa mavuto, kotero chitukuko ndi pang'onopang'ono kwambiri ndi pafupifupi kuthetsedwa zitsulo zotayirira, zitsulo zotayirira, zitsulo zotayirira. dielectrics, ndi mankhwala mankhwala, zipangizo pa ochepa ntchito. Mpaka 1970s, chifukwa zikamera magnetron sputtering luso, sputtering ❖ kuyanika wakhala mofulumira anayamba, anayamba kulowa chitsitsimutso cha msewu. Ichi ndi chifukwa magnetron sputtering njira akhoza anaumirizidwa ndi orthogonal electromagnetic munda pa ma elekitironi, kuwonjezera Mwina kugunda ma elekitironi ndi mpweya mamolekyu, osati kumachepetsa voteji anawonjezera cathode, ndi kusintha sputtering mlingo wa ayoni zabwino pa chandamale cathode, kuchepetsa Mwina wa ma elekitironi, ndi kuphulika kwa ma elekitironi pa substrate. "Kuthamanga kwambiri, kutentha kochepa Makhalidwe awiri akuluakulu a "liwiro ndi kutentha kochepa".

Mpaka zaka za m'ma 1980, ngakhale zidawoneka zaka khumi ndi ziwiri zokha, zimasiyana kwambiri ndi labotale, makamaka pantchito yopanga mafakitale ambiri. Ndi chitukuko china cha sayansi ndi luso, m'zaka zaposachedwapa m'munda wa sputtering ❖ kuyanika ndi kumayambiriro ion mtengo kumatheka sputtering, ntchito lonse mtanda wa amphamvu panopa gwero ion pamodzi ndi maginito kusinthasintha kusinthasintha, ndi kuphatikiza ochiritsira dipole sputtering wapangidwa ndi njira yatsopano sputtering; ndipo kudzakhala kuyambika kwapakati-pafupipafupi kusinthasintha mphamvu panopa kwa magnetron sputtering chandamale gwero. Izi sing'anga-pafupipafupi AC magnetron sputtering luso, wotchedwa mapasa chandamale sputtering, osati kumathetsa "kusoweka" zotsatira za anode, komanso kuthetsa "poizoni" vuto la cathode, amene kwambiri bwino bata la magnetron sputtering, ndipo amapereka maziko olimba kwa mafakitale kupanga mafilimu pawiri woonda. Izi zathandizira kwambiri kukhazikika kwa magnetron sputtering ndikupereka maziko olimba a kupanga mafilimu opangidwa ndi mafakitale opangidwa ndi makina opyapyala. M'zaka zaposachedwapa, sputtering ❖ kuyanika wakhala otentha akutuluka filimu kukonzekera luso, yogwira m'munda wa zingalowe ❖ kuyanika luso.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua