Kodi ndi zinthu ziti zomwe zimakhudza chiphe cha chandamale mu magnetron sputtering?

1, Mapangidwe azitsulo zazitsulo pamtunda womwe mukufuna
Kuchi chilweza chipema hakutwala ku chikungulwila chize chatamba kunyingika yuma yipema?Popeza mankhwala anachita pakati zotakasika mpweya particles ndi chandamale pamwamba maatomu umabala maatomu pawiri, amene nthawi zambiri exothermic, zimene kutentha ayenera kukhala ndi njira yochitira, apo ayi mankhwala anachita sangathe kupitiriza.Pansi pa vacuum, kutengerapo kwa kutentha pakati pa mpweya sikutheka, chifukwa chake mankhwalawo ayenera kuchitika pamalo olimba.Rection sputtering imapanga zinthu pamalo omwe mukufuna, malo apansi panthaka, ndi zina zomangika.Kupanga mankhwala pa gawo lapansi ndi cholinga, kupanga mankhwala pa malo ena structural ndi kuwononga chuma, ndi kupanga mankhwala pa chandamale pamwamba akuyamba monga gwero la maatomu pawiri ndi kukhala chotchinga kuti mosalekeza kupereka zambiri pawiri maatomu.

2, Zomwe zimakhudzidwa ndi poyizoni wa chandamale
Chinthu chachikulu chomwe chikukhudza chiphe chandamale ndi chiŵerengero cha gasi ndi mpweya wotayira, mpweya wochuluka kwambiri umatsogolera ku poizoni.Zotakasika sputtering ndondomeko ikuchitika mu chandamale padziko sputtering njira m'dera zikuoneka kuti ataphimbidwa ndi anachita pawiri kapena anachita pawiri ndi anavula ndi kachiwiri poyera zitsulo pamwamba.Ngati kuchuluka kwa kuphatikizika kwapawiri kuli kokulirapo kuposa kuchuluka kwa kuvula pawiri, malo ofikira pawiri amawonjezeka.Pa mphamvu inayake, kuchuluka kwa gasi komwe kumakhudzidwa ndi m'badwo wapawiri kumawonjezeka ndipo kuchuluka kwa m'badwo ukuwonjezeka.Ngati kuchuluka kwa gasi kumachulukirachulukira, gawo lomwe limakhudzidwa limawonjezeka.Ndipo ngati zomwe gasi zimatuluka mulingo sizingasinthidwe munthawi yake, kuchuluka kwa kufalikira kwa malo akuchulukira sikumaponderezedwa, ndipo njira yothirira idzaphimbidwanso ndi pawiri, pomwe chandamale cha sputtering chaphimbidwa ndi pawiri, chandamale ndi kwathunthu poizoni.

3, Chochitika chakupha chandamale
(1) zabwino ion kudzikundikira: pamene chandamale poyizoni, wosanjikiza insulating filimu adzapangidwa pa chandamale pamwamba, ayoni zabwino kufika cathode chandamale pamwamba chifukwa blockage wa wosanjikiza insulating.Osati mwachindunji kulowa cathode chandamale pamwamba, koma kudziunjikira pa chandamale pamwamba, zosavuta kubala kumunda ozizira kuti arc kumaliseche - arcing, kuti cathode sputtering sangathe kupita.
(2) anode kuzimiririka: pamene chandamale poyizoni, maziko zingalowe chipinda khoma komanso waikamo insulating filimu, kufika ma elekitironi anode sangakhoze kulowa anode, mapangidwe anode kuzimiririka chodabwitsa.

4, Kufotokozera mwakuthupi zakupha chandamale
(1) Nthawi zambiri, gawo lachiwiri la electron emission coefficient of metal compounds ndi lapamwamba kuposa lazitsulo.Pambuyo poyizoni chandamale, pamwamba pa chandamale ndi zonse zitsulo mankhwala, ndipo pambuyo mabomba ndi ayoni, chiwerengero cha ma elekitironi yachiwiri anamasulidwa ukuwonjezeka, amene bwino madutsidwe danga ndi kuchepetsa plasma impedance, zikubweretsa m`munsi sputtering voteji.Izi zimachepetsa sputtering rate.Nthawi zambiri mphamvu ya sputtering ya magnetron sputtering imakhala pakati pa 400V-600V, ndipo poyizoni ikachitika, mphamvu ya sputtering imachepetsedwa kwambiri.
(2) chitsulo chandamale ndi pawiri chandamale poyambirira sputtering mlingo ndi wosiyana, ambiri sputtering kokwana zitsulo ndi apamwamba kuposa sputtering coefficient wa pawiri, kotero sputtering mlingo wochepa pambuyo chandamale poyizoni.
(3) Kutulutsa mphamvu kwa mpweya wotulutsa mpweya wotulutsa mpweya kumakhala kotsika kwambiri kuposa kutulutsa mpweya wabwino wa mpweya wa inert, kotero kuti kutulutsa kwathunthu kumachepa pakatha kuchuluka kwa mpweya wotuluka.

5, Njira zothetsera poyizoni chandamale
(1) Landirani magetsi apakati pafupipafupi kapena mphamvu zamagetsi zamagetsi.
(2) Landirani kuwongolera kotsekeka kwa momwe gasi akulowera.
(3) Khalani ndi zolinga ziwiri
(4) Yang'anirani kusintha kwa ❖ kuyanika: Musanayambe kuyanika, hysteresis effect curve ya chandamale chakupha imasonkhanitsidwa kuti mpweya wolowera ukuwongolere kutsogolo kuti upangitse poizoni wa chandamale kuti muwonetsetse kuti njirayo nthawi zonse isanakhazikitsidwe. mtengo ukutsika kwambiri.

-Nkhaniyi idasindikizidwa ndi Guangdong Zhenhua Technology, wopanga zida zokutira vacuum.