Thezokutira vacuumMakina opangira makina amagawidwa kukhala: zokutira za vacuum evaporation, zokutira za vacuum sputtering ndi zokutira za vacuum ion.
1, Kupaka kwa vacuum evaporation
Pansi pa vakuyumu chikhalidwe kupanga zinthu chamunthuyo, monga zitsulo, zitsulo aloyi, etc. ndiye kuwaika pa gawo lapansi, ndi nthunzi ❖ kuyanika njira zambiri ntchito kukana Kutentha, ndiyeno elekitironi mtengo bombardment wa ❖ kuyanika zakuthupi, kuwapanga iwo. amasinthidwa kukhala gawo la gasi, kenako ndikuyika pamtunda wapansi panthaka, mbiriyakale, vacuum vapor deposition ndiukadaulo wakale womwe umagwiritsidwa ntchito mu njira ya PVD.
2. Kupaka utoto
Mpweyawu umatuluka mowala pansi pa (Ar)-zodzaza vacuum mikhalidwePanthawiyi ma atomu a argon (Ar) mu ma ayoni a nayitrogeni (Ar), ma ion amafulumizitsidwa ndi mphamvu ya gawo lamagetsi, ndikuphulitsa chandamale cha cathode chomwe. amapangidwa ndi zinthu zokutira, chandamalecho chidzatayidwa ndikuyikidwa pansi pa gawo lapansi Zomwe zidachitika mu zokutira za sputter, zomwe zimapezedwa ndi kutulutsa kowala, zimakhala pakati pa 10-2pa mpaka 10Pa, Chifukwa chake tinthu tating'onoting'ono tosavuta kugundana. ndi mamolekyu a mpweya m'chipinda chosungiramo akamawulukira ku gawo lapansi, kupangitsa njira yoyenda mwachisawawa komanso filimu yosungidwayo kukhala yosavuta kukhala yofanana.
3, zokutira ion
Pansi pa vacuum mikhalidwe, Pansi pa vacuum, amagwiritsa ntchito njira ina ya plasma ionisation kuti asungunuke pang'ono maatomu okutira kukhala ayoni. amayikidwa pa gawo lapansi pansi pazambiri zoyipa kuti apange filimu yopyapyala.
Nthawi yotumiza: Mar-23-2023