Kupaka kwa ionmakina zinachokera ku chiphunzitso choperekedwa ndi DM Mattox m'zaka za m'ma 1960, ndipo kuyesa kofananako kunayamba panthawiyo;Mpaka 1971, Chambers ndi ena adafalitsa teknoloji ya electron beam ion plating;Ukadaulo wa reactive evaporation plating (ARE) udawonetsedwa mu lipoti la Bunshah mu 1972, pomwe mitundu yamafilimu olimba kwambiri monga TiC ndi TiN idapangidwa;Komanso mu 1972, Smith ndi Molley anatengera luso la hollow cathode popaka.Pofika zaka za m'ma 1980, plating ya ayoni ku China inali itafika pamlingo wogwiritsa ntchito mafakitale, ndipo njira zokutira monga vacuum multi-arc ion plating ndi arc-discharge ion plating zidawoneka motsatizana.
Ntchito yonse yopangira vacuum ion plating ili motere: choyamba,mpopechipinda cha vacuum, ndiyenodikiranikuthamanga kwa vacuum mpaka 4X10 ⁻ ³ Pakapena bwino, m'pofunika kulumikiza mkulu voteji magetsi ndi kumanga otsika kutentha plasma dera otsika voteji kutulutsa mpweya pakati gawo lapansi ndi evaporator.Lumikizani gawo lapansi lamagetsi ndi 5000V DC negative high voltage kuti mupange kutulutsa kowala kwa cathode.Ma ion a gasi a inert amapangidwa pafupi ndi malo owoneka bwino.Amalowa m'dera lamdima la cathode ndipo amafulumizitsidwa ndi munda wamagetsi ndikuwombera pamwamba pa gawo lapansi.Iyi ndi njira yoyeretsera, ndiyeno lowetsani ndondomeko yophimba.Kupyolera mu mphamvu ya kutentha kwa bombardment, zida zina zokutira zimaphikidwa.Malo a plasma amalowa mu ma protoni, amawombana ndi ma electron ndi ma ion a mpweya wa inert, ndipo gawo laling'ono la iwo ndi ionized, Ma ion ionized awa ndi mphamvu zambiri adzawombera pamwamba pa filimuyo ndikuwongolera khalidwe la filimuyo kumlingo wina.
Mfundo yopangira vacuum ion plating ndi: m'chipinda cha vacuum, pogwiritsa ntchito chotulukapo cha gasi kapena gawo la ionized la zinthu za vaporized, pansi pa bomba la ma ion a vaporized kapena ma ion a gasi, nthawi imodzi ikani zinthu za vaporized kapena ma reactants pa gawo lapansi. kupeza filimu woonda.Kupaka kwa ionmakinalimaphatikiza vacuum evaporation, ukadaulo wa plasma ndi kutulutsa kowala kwa gasi, zomwe sizimangowonjezera mtundu wa filimuyo, komanso kumakulitsa mawonekedwe a filimuyo.Ubwino wa njirayi ndi ma diffraction amphamvu, kumamatira bwino filimu, ndi zida zosiyanasiyana zokutira.Mfundo yopangira ion plating idaperekedwa koyamba ndi DM Mattox.Pali mitundu yambiri ya plating ya ion.Mtundu wodziwika kwambiri ndi kutentha kwa evaporation, kuphatikiza kutentha kwa kutentha, kutentha kwa ma elekitironi, kutentha kwa mtengo wa plasma ma elekitironi, kutentha kwapang'onopang'ono ndi njira zina zotenthetsera.
Nthawi yotumiza: Feb-14-2023