Zida zokutira zophatikizika za magnetron sputtering ndi cathodic multi-arc ion ❖ kuyanika zimatha kugwira ntchito padera komanso nthawi imodzi;akhoza waikamo ndi kukonzekera koyera zitsulo filimu, zitsulo pawiri filimu kapena gulu filimu;ikhoza kukhala filimu imodzi yokha komanso filimu yamagulu ambiri.
Ubwino wake motere:
Sikuti amangophatikiza ubwino wa zokutira zosiyanasiyana ion ndipo amaganizira kukonzekera ndi mafunsidwe a filimu woonda m'madera osiyanasiyana ntchito, komanso amalola mafunsidwe ndi kukonzekera Mipikisano wosanjikiza monolithic mafilimu kapena Mipikisano wosanjikiza mafilimu gulu mu vakuyumu yemweyo. ❖ kuyanika chipinda nthawi imodzi.
Kugwiritsiridwa ntchito kwa zigawo zamakanema osungidwa kumagwiritsidwa ntchito kwambiri matekinoloje ake ali m'njira zosiyanasiyana, zomwe zimafanana ndi izi:
(1) Pawiri wa non-equilibrium magnetron sputtering ndi cathodic ion plating luso.
Chipangizo chake chikuwonetsedwa motere.Ndi zida zokutira za columnar magnetron chandamale ndi planar cathodic arc ion ❖ kuyanika, yomwe ili yoyenera pazida zonse zokutira filimu yophatikizika komanso zokutira zokongoletsa.Pakuti ❖ kuyanika chida, cathodic arc ion ❖ kuyanika ntchito choyamba ❖ kuyanika m'munsi, ndiyeno ndime magnetron chandamale ntchito mafunsidwe nitride ndi zigawo zina filimu kupeza mkulu-mwatsatanetsatane processing chida pamwamba filimu.
Kwa zokongoletsera zokongoletsera, mafilimu okongoletsera a TiN ndi ZrN akhoza kuikidwa ndi cathodic arc coating poyamba, ndiyeno amapangidwa ndi zitsulo pogwiritsa ntchito zolinga za magnetron, ndipo zotsatira za doping zimakhala zabwino kwambiri.
(2) Kuphatikizika kwa mapasa a magnetron ndi njira zokutira za cathode arc ion.Chipangizocho chikuwonetsedwa motere.Amagwiritsidwa ntchito luso lapamwamba la mapasa, pamene zolinga ziwiri za mbali ndi mbali zimagwirizanitsidwa ndi magetsi apakati pafupipafupi, sizimangogonjetsa poizoni wa DC sputtering, moto ndi zovuta zina;ndipo imatha kuyika filimu yabwino kwambiri ya Al203, SiO2 oxide, kuti kukana kwa okosijeni kwa zigawo zokutira kwachulukira ndikuwongolera.Columnar Mipikisano Arc chandamale anaika pakati pa vacuum chipinda, zinthu chandamale angagwiritsidwe ntchito Ti ndi Zr, osati kusunga ubwino mkulu Mipikisano arc dissociation mlingo, mlingo wa kuika, komanso akhoza kuchepetsa "m'malovu" bwino. ndondomeko yaing'ono ndege Mipikisano arc chandamale mafunsidwe, akhoza kusungitsa ndi kukonzekera otsika porosity mafilimu zitsulo, pawiri mafilimu.Ngati Al ndi Si agwiritsidwa ntchito ngati zida zomwe zimayang'aniridwa ndi mapasa opangidwa ndi maginito omwe amayikidwa pozungulira, mafilimu a Al203 kapena Si0 achitsulo-ceramic amatha kuyikidwa ndikukonzedwa.Kuphatikiza apo, ndege zing'onozing'ono zingapo zokhala ndi magwero a evaporation amitundu yambiri zitha kukhazikitsidwa pozungulira, ndipo zomwe mukufuna zitha kukhala Cr kapena Ni, ndipo makanema achitsulo ndi makanema ophatikizika ambiri amatha kuikidwa ndikukonzedwa.Chifukwa chake, ukadaulo wokutira wophatikizika uwu ndiukadaulo wopaka utoto wokhala ndi ntchito zingapo.
Nthawi yotumiza: Nov-08-2022