Plasma imawonjezera mpweya wamankhwala

Makhalidwe a plasma
Chikhalidwe cha plasma mu plasma-inhanced chemical vapor deposition ndikuti imadalira mphamvu ya kinetic ya ma elekitironi mu plasma kuti ayambitse kusintha kwa mankhwala mu gawo la gasi.Popeza plasma ndi gulu la ayoni, ma elekitironi, maatomu osalowerera ndale ndi mamolekyu, salowerera ndale pamagetsi pamlingo wa macroscopic.Mu plasma, mphamvu zambiri zimasungidwa mkati mwa mphamvu ya plasma.Plasma poyamba imagawidwa kukhala plasma yotentha ndi plasma yozizira.mu dongosolo la PECVD ndi plasma yozizira yomwe imapangidwa ndi kutulutsa mpweya wochepa.Madzi a m'magazi awa omwe amapangidwa ndi kutsika kwapang'onopang'ono pansi pa mazana angapo Pa ndi plasma yosagwirizana ndi gasi.
Chikhalidwe cha plasma ichi ndi ichi:
(1) Kuyenda kosasinthasintha kwa ma electron ndi ma ion kumaposa kayendedwe kawo.
(2) Njira yake ya ionization imayamba makamaka chifukwa cha kugunda kwa ma elekitironi othamanga ndi mamolekyu a gasi.
(3) Wapakati matenthedwe zoyenda mphamvu ma elekitironi ndi 1 kuti 2 madongosolo a ukulu kuposa particles olemera, monga mamolekyu, maatomu, ayoni ndi ma radicals ufulu.
(4) Kutaya mphamvu pambuyo pa kugunda kwa ma electron ndi particles zolemetsa zikhoza kulipidwa kuchokera kumunda wamagetsi pakati pa kugunda.
Zimakhala zovuta kuwonetsa plasma yotsika kwambiri yopanda kutentha yokhala ndi chiwerengero chochepa cha magawo, chifukwa ndi plasma yotsika yopanda kutentha mu dongosolo la PECVD, kumene kutentha kwa electron Te sikufanana ndi kutentha kwa Tj kwa tinthu tating'onoting'ono.Muukadaulo wa PECVD, ntchito yayikulu ya plasma ndikupanga ma ion amadzimadzi komanso ma free-radicals.Ma ions awa ndi ma free-radicals amachitanso ndi ma ion ena, ma atomu ndi mamolekyu mu gawo la mpweya kapena amayambitsa kuwonongeka kwa latisi ndi zochita za mankhwala pa gawo lapansi, ndipo zokolola zazinthu zogwira ntchito ndi kachulukidwe ka elekitironi, ndende ya reactant ndi coefficient ya zokolola.M'mawu ena, zokolola za zinthu yogwira zimadalira mphamvu kumunda magetsi, mpweya kuthamanga, ndi pafupifupi ufulu osiyanasiyana particles pa nthawi kugunda.Pamene mpweya wa reactant mu plasma umasiyanitsidwa chifukwa cha kugunda kwa ma elekitironi amphamvu kwambiri, chotchinga chotchinga cha mankhwala amatha kugonjetsedwa ndipo kutentha kwa mpweya wotulutsa mpweya kumatha kuchepetsedwa.Kusiyanitsa kwakukulu pakati pa PECVD ndi CVD wamba ndikuti mfundo za thermodynamic zamankhwala amachitidwe ndizosiyana.The dissociation wa mamolekyu mpweya mu plasma si kusankha, kotero filimu wosanjikiza waikamo ndi PECVD ndi osiyana kotheratu ndi ochiritsira CVD.Gawo lopangidwa ndi PECVD likhoza kukhala losagwirizana, ndipo mapangidwe ake salinso ochepa ndi equilibrium kinetics.Wosanjikiza kwambiri filimu ndi amorphous state.

Zithunzi za PECVD
(1) Kutentha kochepa kwa malo.
(2) Chepetsani kupsinjika kwamkati komwe kumachitika chifukwa cha kusagwirizana kwa mzere wowonjezera wowonjezera wa membrane / maziko.
(3) Mtengo woyikapo ndi wokwera kwambiri, makamaka kutentha kwapansi, komwe kumathandizira kupeza mafilimu amorphous ndi microcrystalline.

Chifukwa cha kutsika kwa kutentha kwa PECVD, kuwonongeka kwamafuta kumatha kuchepetsedwa, kufalikira kwapakati ndi zomwe zimachitika pakati pa filimu yosanjikiza ndi gawo lapansi zitha kuchepetsedwa, etc., kotero kuti zida zamagetsi zitha kuphimbidwa zonse zisanapangidwe kapena chifukwa chosowa. kwa rework.Popanga ma ultra-large scale integrated circuits (VLSI, ULSI), teknoloji ya PECVD imagwiritsidwa ntchito bwino popanga filimu ya silicon nitride (SiN) monga filimu yomaliza yoteteza pambuyo popanga mawaya a Al electrode, komanso flattening ndi kupanga filimu ya silicon oxide ngati insulation interlayer.Monga zida zafilimu zoonda, ukadaulo wa PECVD wagwiritsidwanso ntchito bwino popanga ma thin-film transistors (TFTs) owonetsera LCD, ndi zina zotero, pogwiritsa ntchito galasi ngati gawo lapansi mu njira yogwira ntchito ya matrix.Ndi chitukuko cha mabwalo ophatikizika mpaka kukula kwakukulu komanso kuphatikiza kwakukulu komanso kugwiritsa ntchito kwambiri zida za semiconductor pawiri, PECVD imayenera kuchitidwa pa kutentha kochepa komanso njira zapamwamba zamagetsi amagetsi.Kuti akwaniritse izi, matekinoloje omwe amatha kupanga mafilimu a flatness apamwamba pa kutentha kotsika ayenera kupangidwa.Mafilimu a SiN ndi SiOx adaphunziridwa kwambiri pogwiritsa ntchito plasma ya ECR ndi teknoloji yatsopano ya plasma chemical vapor deposition (PCVD) yokhala ndi plasma ya helical, ndipo afika pamlingo wothandiza pakugwiritsa ntchito mafilimu otsekemera a interlayer kwa mabwalo akuluakulu ophatikizika, ndi zina zotero.