Thermally okondwa mankhwala nthunzi mafunsidwe

Nthawi zambiri machitidwe a CVD amadalira kutentha kwambiri, motero amatchedwa thermally excited chemical vapor deposition (TCVD).Nthawi zambiri amagwiritsa ntchito ma precursors ndipo amachitidwa muzitsulo zotentha zakhoma komanso zozizira.Njira zake zotenthetsera zimaphatikizira kutentha kwa ma radio frequency (RF), kutentha kwa ma radiation a infrared, kutentha kwamphamvu, etc.

Hot khoma mankhwala nthunzi mafunsidwe
Kwenikweni, hot-wall chemical vapor deposition reactor ndi ng'anjo ya thermostatic, yomwe nthawi zambiri imatenthedwa ndi zinthu zopinga, kuti ipangike pakapita nthawi.Kujambula kwa malo opangira mpweya wotentha wa makhoma opangira zida za chip kukuwonetsedwa motere.Kuyika kwa nthunzi yamakhoma kotenthaku kumatha kuvala TiN, TiC, TiCN ndi makanema ena owonda.The riyakitala akhoza kupangidwa kuti lalikulu mokwanira ndiye kugwira chiwerengero chachikulu cha zigawo zikuluzikulu, ndi zinthu akhoza lizilamuliridwa ndendende kwambiri deposition.Chithunzi 1 chikuwonetsa chipangizo cha epitaxial chosanjikiza cha silicon doping yopanga zida za semiconductor.The gawo lapansi mu ng'anjo aikidwa mu malangizo ofukula kuchepetsa kuipitsidwa mafunsidwe pamwamba ndi particles, ndi kuonjezera kupanga Mumakonda.Ma rectors otentha opangira semiconductor nthawi zambiri amagwiritsidwa ntchito pazovuta zochepa.