1) Intego za Cylindrical zifite igipimo cyinshi cyo gukoresha kuruta intego za planari.Muburyo bwo gutwikira, bwaba ari ubwoko bwa magnetique buzunguruka cyangwa ubwoko bwa rotary trube ya silindrike yo gusunika, ibice byose byubuso bwigitereko gikomeza guhora binyura mumasoko yabyaye imbere ya magneti ahoraho kugirango yakire cathode, kandi intego irashobora guhindagurika kimwe, kandi igipimo cyo gukoresha ni kinini.Igipimo cyo gukoresha ibikoresho bigenewe ni 80% ~ 90%.
2) Intego za cylindrical ntizoroshye kubyara "uburozi bwintego".Mugihe cyo gutwikira, ubuso bwigitereko bugenewe buri gihe gusukwa no guterwa na ion, kandi ntibyoroshye kwegeranya okiside yibyibushye hamwe nizindi firime zikingira hejuru, kandi ntabwo byoroshye kubyara "uburozi bwintego".
3) Imiterere ya rotary target tube ya silindrical sputtering intego iroroshye kandi yoroshye kuyishyiraho.
4) Ibikoresho bya silindrike yibikoresho bifite ubwoko butandukanye.intego ya planar hamwe nicyuma giteganijwe gukonjesha amazi, kandi bimwe ntibishobora gutunganywa no gushingwa intego ya silindrike, nka In2-SnO2 intego, nibindi hamwe nibikoresho byifu ya isostatike ishyushye kugirango ubone intego zisa nisahani, kuko ubunini ntibushobora gukorwa binini, kandi bivunaguritse, birakenewe rero gukoresha uburyo bwa brazing hamwe numuringa winyuma kugirango uhuze hanyuma ushyire kumurongo wibanze.Usibye imiyoboro yicyuma, intego yinkingi irashobora kandi guterwa hejuru yimiyoboro idafite ibyuma hamwe nibikoresho bitandukanye bigomba gutwikirwa, nka Si, Cr, nibindi.
Kugeza ubu, igipimo cy’intego za silindrique zo gutwikira mu nganda ziyongera.Intego ya cylindrical ntabwo ikoreshwa gusa kumashini ihagaritse gusa ahubwo inakoresha mumuzingo kugirango imashini itwikire.Mumyaka yashize, planar twin intego zasimbuwe buhoro buhoro na Cylindrical twin intego.
——Iyi ngingo yasohowe na tekinoroji ya Guangdong Zhenhua, auruganda rukora imashini nziza.
Igihe cyo kohereza: Gicurasi-11-2023