Ikoranabuhanga rya Vapor Deposition (CVD) nubuhanga bukora firime ikoresha ubushyuhe, kongera plasma, gufashwa nifoto nubundi buryo bwo gukora ibintu bya gaze bitanga firime zikomeye hejuru yubutaka binyuze mumyuka ya chimique kumuvuduko usanzwe cyangwa muke.
Mubisanzwe, reaction aho reaction iba gaze kandi kimwe mubicuruzwa ni bikomeye byitwa CVD reaction.Hariho ubwoko bwinshi bwimyenda yateguwe na CVD reaction, cyane cyane mubikorwa bya semiconductor.Kurugero, mumashanyarazi ya semiconductor, gutunganya ibikoresho bibisi, gutegura amafirime meza yo mu rwego rwo hejuru ya firime imwe ya kirisiti, hamwe no gukura kwa firime polycrystalline na amorphous, kuva mubikoresho bya elegitoronike kugeza kumuzunguruko, byose bifitanye isano na tekinoroji ya CVD.Mubyongeyeho, kuvura hejuru yibikoresho bikundwa nabantu.Kurugero, ibikoresho bitandukanye nkimashini, reaktor, icyogajuru, ibikoresho byubuvuzi nubumashini birashobora gukoreshwa mugutegura ibifuniko bikora birwanya ruswa, birwanya ubushyuhe, kwihanganira kwambara no gushimangira ubuso hakoreshejwe uburyo bwa firime ya CVD ukurikije ibyo basabwa bitandukanye.
—— Iyi ngingo yasohowe na Guangdong Zhenhua, uwakozeibikoresho byo gutwika vacuum
Igihe cyo kohereza: Werurwe-04-2023