Control Kugenzura neza no gusubiramo ubunini bwa firime
Niba ubunini bwa firime bushobora kugenzurwa ku giciro cyagenwe byitwa ubugari bwa firime.Umubyimba wa firime usabwa urashobora gusubirwamo inshuro nyinshi, ibyo bita ubunini bwa firime isubirwamo.Kubera ko imyuka isohoka hamwe nintego yumuriro wa vacuum sputtering coating irashobora kugenzurwa ukwayo.Kubwibyo, umubyimba wa firime ucuramye urashobora kugenzurwa, kandi firime ifite uburebure bwateganijwe irashobora kubikwa neza.Mubyongeyeho, igipfundikizo gishobora kubona firime ifite ubunini bumwe hejuru yubunini.
Ad Kwizirika gukomeye hagati ya firime na substrate
Ingufu za atome zisukuye ni 1-2 ordre yubunini burenze ubwa atome zahumutse.Ihinduka ryingufu za atome zifite ingufu nyinshi zashyizwe kuri substrate zirarenze cyane ugereranije na atome zahumutse, zitanga ubushyuhe bwinshi kandi zikongerera guhuza hagati ya atome zasutswe na substrate.Byongeye kandi, ingufu zimwe na zimwe za atome zitanga ingufu zitanga urwego rutandukanye rwo gutera inshinge, bigakora pseudodiffusion layer kuri substrate.Byongeye kandi, substrate ihora isukurwa kandi igakorerwa mukarere ka plasma mugihe cyo gukora firime, ikuraho atome ziva hamwe na adhesion nkeya, kandi igasukura kandi igakora hejuru yubutaka.Kubwibyo, firime isukuye ifatanye cyane na substrate.
Filime Ibikoresho bishya bitandukanye nintego birashobora gutegurwa
Niba gaze ya reaction itangizwa mugihe cyo gusohora kugirango ikore intego, film nshya yibintu itandukanye rwose nintego irashobora kuboneka.Kurugero, silikoni ikoreshwa nkintego yo gusohora, na ogisijeni na argon bishyirwa mucyumba cya vacuum hamwe.Nyuma yo gusohora, firime ya SiOz irashobora kuboneka.Ukoresheje titanium nkintego yo gusohora, azote na argon bishyirwa mucyumba cya vacuum hamwe, kandi icyiciro cya TiN kimeze nka zahabu gishobora kuboneka nyuma yo gusohoka.
Isuku ryinshi kandi ryiza rya firime
Kubera ko nta kintu cyingenzi kiri mu bikoresho byo gutegura firime, ibice bigize ibikoresho bishyushya ntibishobora kuvangwa murwego rwa firime.Ibibi byo gutwikisha ibicuruzwa ni uko firime ikora umuvuduko itinda kurenza iy'umwuka uhumeka, ubushyuhe bwa substrate buri hejuru, biroroshye kwibasirwa na gaze yanduye, kandi imiterere yibikoresho iragoye.
Iyi ngingo yasohowe na Guangdong Zhenhua, uruganda rwaibikoresho byo gutwika vacuum
Igihe cyo kohereza: Werurwe-09-2023