Ipfunyika ya Vacuum ikubiyemo cyane cyane imyuka ya vacuum, gusuka hamwe no gutwika ion, ibyo byose bikoreshwa mukubika firime zitandukanye zicyuma nicyuma kitari icyuma hejuru yibice bya plastike mukuyungurura cyangwa gusuka mubihe bya vacuum, bishobora kubona igipande cyoroshye cyane. hamwe ninyungu zidasanzwe zo gufatira vuba, ariko igiciro nacyo kiri hejuru, kandi ubwoko bwibyuma bishobora gukoreshwa ni bike, kandi mubisanzwe bikoreshwa mugukora ibicuruzwa byo murwego rwohejuru.
Imyuka ya Vacuum ni uburyo bwo gushyushya ibyuma munsi yumuvu mwinshi, bigatuma bishonga, bigahinduka, kandi bigakora firime yoroheje yicyuma hejuru yicyitegererezo nyuma yo gukonja, hamwe nubunini bwa 0.8-1.2 um.Yuzuza uduce duto twa convex na convex hejuru yibicuruzwa byakozwe kugirango ubone ubuso busa nindorerwamo. Iyo imyuka ya vacuum ikozwe haba kugirango ibone ingaruka zindorerwamo zigaragaza cyangwa kugirango vacuum ihumeke ibyuma bifatanye neza, hejuru yubutaka igomba gutwikirwa.
Gusohora mubisanzwe bivuga magnetron gusohora, nuburyo bwihuta bwihuse bwubushyuhe bwo hasi.Inzira isaba icyuho cya 1 × 10-3Torr, ni ukuvuga 1,3 × 10-3Pa vacuum leta yuzuyemo gaze ya inert ya gaz (Ar), no hagati ya substrate ya plastike (anode) hamwe nicyuma (cathode) hiyongereyeho ingufu nyinshi umuyoboro utaziguye, bitewe na elegitoronike ya gaze ya inert iterwa no gusohora urumuri, itanga plasma, plasma izaturika atome yintego yicyuma ikayishyira kuri substrate ya plastike.Ibyinshi mubyuma rusange bifata ibyuma bikoresha DC, mugihe ibikoresho bya ceramique bitayobora bifashisha RF AC.
Ion isize ni uburyo bwo gusohora gazi ikoreshwa mugutandukanya igice cya gaze cyangwa ibintu bigahumeka mugihe cyimyuka, kandi ibintu byahumetse cyangwa reaction yabyo bigashyirwa kuri substrate mugutera ibisasu bya ion cyangwa ion yibintu byahumutse.Muri byo harimo magnetron sputtering ion coating, ion reaction reaction, coho cathode isohora ion coating (uburyo bwo kubika imyuka ya cathode)
Vertical double-side magnetron isuka ikomeza gutwikira kumurongo
Byakoreshwa cyane, birashobora gukoreshwa mubikoresho bya elegitoronike nk'ikaye ya EMI ikingira ikibiriti, ibicuruzwa bisize, ndetse n'ibicuruzwa byose by'igikombe cy'amatara muburebure bwihariye birashobora gukorwa.Ubushobozi bunini bwo gupakira, gufunga byoroheje hamwe no gutondekanya gukomeretsa ibikombe byoroheje bya conic kubitwikiriye impande zombi, bishobora kugira ubushobozi bunini bwo gupakira.Ubwiza butajegajega, guhuza neza kwa firime kuva kumurongo kugeza kumurongo.Urwego rwohejuru rwo kwikora hamwe nigiciro gito cyakazi.
Igihe cyo kohereza: Ugushyingo-07-2022