Imashini itwikiriye Ion yakomotse ku gitekerezo cyatanzwe na DM Mattox mu myaka ya za 1960, kandi ubushakashatsi bujyanye nabwo bwatangiye icyo gihe;Kugeza mu 1971, Byumba n'abandi basohoye ikoranabuhanga rya elegitoroniki ya ion;Ikoreshwa rya tekinoroji ya tekinike (ARE) yerekanwe muri Bu ...
Ihame rya Magnetron ihindagurika: electron zigongana na atome ya argon mugikorwa cyo kwihuta kugera kuri substrate munsi yumurima wumuriro wamashanyarazi, ionizing umubare munini wa argon ion na electron, na electron ziguruka kuri substrate.Argon ion yihutisha gutera ibisasu intego ...