Inzira Itemba yimashini itwikiriye

1. Bombardment isukura substrate

1.1) Imashini itwikiriye imashini ikoresha glow isohoka kugirango isukure substrate.Nukuvuga ko kwishyuza gaze ya argon mucyumba, voltage isohoka igera kuri 1000V, Nyuma yo gufungura amashanyarazi, havamo urumuri rwinshi, kandi substrate igasukurwa na bombe ya argon.

1.2) Mu gusohora imashini zitwikiriye zikora inganda zikora imitako yo mu rwego rwo hejuru, ion ya titanium itangwa nisoko ntoya ya arc ikoreshwa cyane mugusukura.Imashini itwikiriye imashini ifite ibikoresho bito bito bya arc, kandi umugezi wa titanium ion muri plasma ya arc uterwa nisoko ntoya ya arc ukoreshwa mugutera ibisasu no gusukura substrate.

2. Titanium nitride

Iyo ubitse titanium nitride yoroheje, ibikoresho bigenewe gusohora ni intego ya titanium.Ibikoresho bigenewe bihujwe na electrode mbi yo gutanga amashanyarazi, kandi intego ya voltage ni 400 ~ 500V;Amazi ya argon arakosowe, kandi icyuho cyo kugenzura ni (3 ~ 8) x10^-1PA.Substrate ihujwe na electrode mbi yo kubogama kubogamye, hamwe na voltage ya 100 ~ 200V.

Nyuma yo gufungura amashanyarazi yintego ya titanium, hasohoka urumuri rwinshi, kandi ingufu za argon ion zifite ingufu nyinshi zitera igisasu, zitera atomani ya titanium.

Azote ya gaze ya azote yatangijwe, kandi atome ya titanium na azote byinjizwa muri ioni ya titanium na ion ya azote mu cyumba cyo gutwikira.Mugukurura amashanyarazi mabi kubogamye akoreshwa kuri substrate, ion ya titanium na ion ya azote yihuta kugera hejuru ya substrate kugirango reaction ya chimique no kuyishiraho kugirango ikore titanium nitride.

3. Kuramo substrate

Nyuma yo kugera kubyimbye bya firime byateganijwe mbere, uzimye amashanyarazi atemba, substrate bias itanga amashanyarazi, nisoko ryikirere.Nyuma yubushyuhe bwa substrate buri munsi ya 120 ℃, uzuza icyumba cyo gutwikamo umwuka hanyuma usohokane substrate.

Iyi ngingo yatangajwe naimashini ikora magnetron- Guangdong Zhenhua.