Ibikoresho bya tekinike ya vacuum magnetron ibikoresho byo gutwikira

Vacuum magnetron sputtering irakwiriye cyane cyane kubitwikiriye.Mubyukuri, iyi nzira irashobora kubitsa firime yoroheje yibintu byose bya oxyde, karbide, nibikoresho bya nitride.Byongeye kandi, inzira nayo irakwiriye cyane cyane kubikwa muma firime menshi, harimo ibishushanyo mbonera, firime yamabara, impuzu zidashobora kwambara, nano-laminates, superlattice coatings, firime izirinda, nibindi. Nko mu 1970, firime nziza ya optique ingero zo kubitsa zateguwe kubikoresho bitandukanye bya optique ya firime.Ibyo bikoresho birimo ibikoresho bitwara ibintu bisobanutse, semiconductor, polymers, oxyde, karbide, na nitride, mugihe fluoride ikoreshwa mubikorwa nko gutwika umwuka.

Inyungu nyamukuru yuburyo bwo gukwirakwiza magnetron ni ugukoresha uburyo bwo gutwika ibintu cyangwa kudakora kugirango ubike ibice byibyo bikoresho no kugenzura neza ibice bigize ibice, uburebure bwa firime, ubunini bwa firime hamwe nubukanishi bwa layer.Inzira ifite ibiranga nkibi bikurikira.

1 rate Igipimo kinini cyo kubitsa.Bitewe no gukoresha electrode yihuta ya magnetron, umuvuduko munini wa ion urashobora kuboneka, bikazamura neza igipimo cyogusohora nigipimo cyimyenda yiyi nzira.Ugereranije nubundi buryo bwo gutwikisha ibintu, magnetron sputtering ifite ubushobozi bwinshi numusaruro mwinshi, kandi ikoreshwa cyane mubikorwa bitandukanye byinganda.

2 power Gukoresha ingufu nyinshi.Intego ya Magnetron isunika muri rusange hitamo voltage iri hagati ya 200V-1000V, mubisanzwe ni 600V, kubera ko voltage ya 600V iri murwego rwo hejuru rukora neza.

3. Ingufu nkeya.Intego ya magnetron ikoresha ingufu zikoreshwa muke, kandi umurima wa magnetiki ufunga plasma hafi ya cathode, ikabuza ingufu zashizwemo ingufu zitangirira kuri substrate.

4 temperature Ubushyuhe bwo hasi.Anode irashobora gukoreshwa kugirango iyobore electron zakozwe mugihe cyo gusohora, ntagikeneye inkunga ya substrate kugirango irangire, ishobora kugabanya neza ibisasu bya electron kuri substrate.Ubushyuhe bwa substrate rero buri hasi, nibyiza cyane kubintu bimwe na bimwe bya plastike idashobora kwihanganira ubushyuhe bwo hejuru.

5, Magnetron isohora intego hejuru yubutaka ntabwo ari kimwe.Magnetron isunika intego yubuso iringaniye iterwa numurima wa magneti utaringaniye wintego.Ahantu igipimo cyo gutera ni kinini, kuburyo igipimo cyiza cyo gukoresha intego kiri hasi (igipimo cyo gukoresha 20-30% gusa).Kubwibyo, kugirango utezimbere imikoreshereze yintego, gukwirakwiza magnetiki yumurima bigomba guhinduka muburyo bumwe, cyangwa gukoresha magnesi zigenda muri cathode nabyo bishobora kunoza imikoreshereze yintego.

6 target Intego.Irashobora gukora compte igamije gutwikira firime.Kugeza ubu, ikoreshwa rya magnetron yibikoresho byo guteranya ibintu byashyizwe ahagaragara neza kuri Ta-Ti alloy, (Tb-Dy) -Fe na Gb-Co ya firime.Intego yibikorwa igizwe nubwoko bune, buri kimwe, ni uruziga ruzengurutswe, intego ya kare iringaniye, intego ntoya ya kare hamwe nintego yumurenge.Imikoreshereze yumurenge yashizwemo intego ni nziza.

7. Urutonde runini rwa porogaramu.Inzira ya Magnetron irashobora kubitsa ibintu byinshi, ibisanzwe ni: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti , Zr, SiO, AlO, GaAs, U, W, SnO, nibindi

Magnetron sputtering nimwe mubikorwa bikoreshwa cyane kugirango ubone firime nziza.Hamwe na cathode nshya, ifite intego yo gukoresha cyane hamwe nigipimo kinini cyo kubitsa.Ikoranabuhanga rya Guangdong Zhenhua vacuum magnetron sputtering coating ubu irakoreshwa cyane mugutwikiriye ahantu hanini.Inzira ntabwo ikoreshwa gusa muri firime imwe gusa, ahubwo inakoreshwa mugutwikiriye ibice byinshi bya firime, byongeye kandi, ikoreshwa no mumuzingo kugirango uzunguruke mugupakira firime, firime optique, lamination nibindi bitwikiriye firime.