Inzira ya Arc Ntoya Inkomoko Ion

Inzira ya cathodic arc inkomoko ya ion itwikiriye ahanini ni kimwe nubundi buryo bwa tekinoroji yo gutwikira, kandi ibikorwa bimwe nko gushiraho ibihangano hamwe na vacuum ntibikigaruka.

1.Bombardment isuku y'ibikorwa

Mbere yo gutwikira, gaze ya argon yinjizwa mucyumba cyo gutwikamo icyuho cya 2 × 10-2Pa.

Zingurura amashanyarazi kubogama, hamwe ninshingano ya 20% hamwe no kubogama kumurimo wa 800-1000V.

Iyo imbaraga za arc zifunguye, hashyizweho umurima ukonje arc urumuri rusohoka, rusohora umuyaga mwinshi wa electron hamwe na titanium ion iva mumasoko ya arc, ikora plasma yuzuye cyane.Iion ya titanium yihutisha kuyitera mu kazi munsi y’umuvuduko ukabije wo kubogama ukoreshwa ku kazi, gutera ibisasu no gusuka gaze isigaye hamwe n’ibyuka bihumanya byashyizwe hejuru y’akazi, no gusukura no kweza ubuso bw’akazi;Muri icyo gihe, gaze ya chlorine mu cyumba cyo gutwikamo ioni na electron, kandi ion ya argon yihutisha ibisasu hejuru y’akazi.

Kubwibyo, ingaruka zo guhanagura ibisasu nibyiza.Gusa nk'iminota 1 yo guhanagura ibisasu birashobora kweza igihangano, cyitwa "arc arc bombardment".Bitewe n'ubwinshi bwa ioni ya titanium, niba isoko ntoya ya arc ikoreshwa mugutera ibisasu no guhanagura ibihangano igihe kirekire, ubushyuhe bwakazi bukunda gushyuha cyane, kandi inkombe yibikoresho irashobora kuba yoroshye.Mubikorwa rusange, amasoko mato ya arc ahindurwamo umwe umwe kuva hejuru kugeza hasi, kandi buri soko ntoya ya arc ifite igihe cyo gukora ibisasu kumunota 1.

（1） Gupfuka titanium hasi

Kugirango tunonosore imikoranire hagati ya firime na substrate, urwego rwa titanium substrate isanzwe rushyirwaho mbere yo gutwika nitride ya titanium.Hindura urwego rwa vacuum kuri 5 × 10-2-3 × 10-1Pa, uhindure akazi ka bias voltage kuri 400-500V, hanyuma uhindure urwego rwimisoro yumuriro wa pulse kubogama kuri 40% ~ 50%.Biracyakongoka inkomoko ntoya arc imwe imwe kugirango itange imbeho ikonje arcing isohoka.Bitewe no kugabanuka kwa bias mbi ya voltage yumurimo wakazi, ingufu za titanium ion ziragabanuka.Nyuma yo kugera kumurimo, ingaruka zo gusohora ntiziri munsi yo guta, kandi hashyizweho urwego rwinzibacyuho rwa titanium kugirango rutezimbere imbaraga zihuza hagati ya titanium nitride ikomeye ya firime na substrate.Iyi nzira nayo ni inzira yo gushyushya igihangano.Iyo intego ya titanium isohotse, urumuri muri plasma ni azure ubururu.

1.Amoniated igikombe gikomeye cya firime

Hindura impamyabumenyi ya vacuum kuri 3 × 10^-1-5Pa, uhindure akazi ka bias voltage kuri 100-200V, hanyuma uhindure urwego rwimisoro yumuriro wa pulse bias amashanyarazi kugeza 70% ~ 80%.Azote imaze kwinjizwa, titanium ni reaction reaction hamwe na arc isohora plasma yo kubika titanium nitride firime ikomeye.Kuri ubu, urumuri rwa plasma mucyumba cya vacuum ni Cherry umutuku.Niba C.₂H₂, O.₂, nibindi byatangijwe, TiCN, TiO₂, nibindi bice bya firime birashobora kuboneka.

–Iyi ngingo yasohowe na Guangdong Zhenhua, aimashini ikora imashini