Isahani ya Vacuum (isahani ya ion mu magambo ahinnye) ni tekinolojiya mishya yo kuvura hejuru yateye imbere byihuse mu myaka ya za 70, ikaba yarasabwe na DM Mattox wo muri sosiyete ya Somdia muri Amerika muri 1963. Bivuga inzira yo gukoresha isoko yo guhumeka cyangwa gusohoka. intego yo guhumeka cyangwa gusuka ibikoresho bya firime mukirere cya vacu.
Icyambere nugukora ibyuka byumuyaga mugushyushya no guhumeka ibikoresho bya firime, bigizwe igice kimwe mubyuka byumuyaga hamwe na atome zidafite ingufu zitagira aho zibogamiye mumwanya wa gaze ya plasma, kandi ikagera kuri substrate kugirango ikore firime binyuze mumikorere yumurima wamashanyarazi. ;iyanyuma ikoresha ion zifite ingufu nyinshi (Urugero, Ar +) itera ibisasu hejuru yibikoresho bya firime kugirango uduce duto twavunitse tuyinjizemo ion cyangwa atome zidafite ingufu zitabogamye binyuze mumwanya wa gaze isohoka, kandi ikamenya ubuso bwa substrate gukora firime.
Iyi ngingo yasohowe na Guangdong Zhenhua, uruganda rwaibikoresho byo gutwika vacuum
Igihe cyo kohereza: Werurwe-10-2023