Nibihe bintu bigira ingaruka kuburozi bwa magnetron sputtering？

1, Gushiraho ibyuma bivanze hejuru yintego
Nihehe ifumbire ikorwa muburyo bwo gukora ibice biva hejuru yicyuma hejuru yuburyo bworoshye?Kubera ko imiti yimiti iri hagati ya gaze ya gaze na atome igenewe kubyara atome ikomatanya, ubusanzwe ikaba idasanzwe, ubushyuhe bwa reaction bugomba kugira uburyo bwo kubikora, bitabaye ibyo imiti ntishobora gukomeza.Mugihe cyimyuka, guhererekanya ubushyuhe hagati ya gaze ntibishoboka, bityo imiti yimiti igomba kubera hejuru ikomeye.Imyitwarire yimyitwarire itanga ibice hejuru yintego, hejuru yubutaka, nubundi buryo bwubatswe.Kubyara ibice hejuru yubutaka nintego, kubyara ibice mubindi bice byubatswe ni uguta umutungo, kandi kubyara ibice hejuru yintego bitangira nkisoko ya atome ivanze kandi bigahinduka inzitizi yo gukomeza gutanga atome nyinshi.

2, Ingaruka ziterwa nuburozi bwintego
Ikintu nyamukuru kigira ingaruka ku burozi bw’intego ni igipimo cya gaze ya gaze na gaze ya gazi, gazi nyinshi cyane izatera uburozi.Igikorwa cyimyororokere gikora gikorerwa mugice cyerekanwe hejuru yubuso bwumuyoboro ugaragara nkaho utwikiriwe nuruvangitirane cyangwa ibivanze byambuwe kandi byongeye kugaragara hejuru yicyuma.Niba igipimo cyibisekuru byinshi birenze igipimo cyo kwambura ibice, agace kegeranye kiyongera.Ku mbaraga runaka, ubwinshi bwa gaze ya reaction igira uruhare mubyara umusaruro wiyongera kandi igipimo cyibisekuruza byiyongera.Niba ubwinshi bwa gaze ya reaction yiyongera cyane, agace kegeranye kiyongera.Niba kandi umuvuduko wa gazi ya reaction idashobora guhinduka mugihe, igipimo cyubwiyongere bwikibanza cyiyongereye ntigishobora guhagarikwa, kandi umuyoboro wogusohora uzarushaho gutwikirwa nuruvange, mugihe intego yo gusuka iba yuzuye neza nuru ruganda, intego ni uburozi rwose.

3, Intego yibikorwa byuburozi
.Ntabwo winjira muburyo butaziguye cathode, ariko ukusanyirize hejuru yintego, byoroshye kubyara umurima ukonje kugirango arc isohoke - arcing, kugirango cathode isohoka idashobora gukomeza.
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4, Ibisobanuro bifatika byuburozi
.Nyuma yuburozi bwibasiwe, hejuru yintego ni ibyuma byose, kandi nyuma yo guterwa ibisasu na ion, umubare wa electroni ya kabiri yarekuwe ukiyongera, ibyo bikaba byongera ubworoherane bwumwanya kandi bikagabanya inzitizi ya plasma, biganisha kuri voltage yo hasi.Ibi bigabanya igipimo cyo gusohoka.Mubisanzwe imbaraga zo gusohora za magnetron zisohoka ziri hagati ya 400V-600V, kandi iyo uburozi bwibasiwe bubaye, imbaraga za sputtering zigabanuka cyane.
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5, Ibisubizo byuburozi
(1) Emera amashanyarazi aringaniye cyangwa amashanyarazi ya radiyo.
(2) Emera kugenzura-gufunga kugenzura imyuka yinjira.
(3) Emera intego zimpanga
. igipimo kigabanuka cyane.

–Iyi ngingo yasohowe na Guangdong Zhenhua Technology, ikora ibikoresho byo gutwika vacuum.