Ni ubuhe buryo bwo gutunganya imashini ya vacuum?Ihame ry'akazi ni irihe?

Uwitekavacuumimikorere yimashini igabanyijemo: gutwika vacuum, gutwika vacuum sputtering coating na vacuum ion coating.

1 ating Igikoresho cyo guhumeka

Mugihe cya vacuum, kora ibikoresho bihumeka ， nkicyuma, ibyuma bivangwa nicyuma, nibindi hanyuma ubishyire hejuru yubutaka, uburyo bwo gutwika umwuka mubi bukoreshwa mubushuhe bwo guhangana, hanyuma bombe ya elegitoronike yibikoresho byo gutwikira, ubikora yahindutse mubyiciro bya gaze, hanyuma ubike hejuru yubutaka, mumateka, imyuka ya vacuum ni tekinoroji yambere yakoreshejwe muburyo bwa PVD.

2 co Gutera hejuru

Gazi ikorerwa urumuri rwinshi (Ar) rwuzuyemo icyuho Muri iki gihe, ion ya argon (Ar) ion ion muri azote (Ar), ion zihutishwa nimbaraga zumuriro w'amashanyarazi ， hanyuma igatera ibisasu kuri cathode. ikozwe mubikoresho byo gutwikira, intego izasohoka hanyuma igashyirwa hejuru yubutaka bwa substrate Iion yibitereko bya sputter, muri rusange byabonetse no gusohora urumuri, biri hagati ya 10-2pa kugeza 10Pa ， Rero uduce duto duto tworoshye kugongana hamwe na molekile ya gaze mucyumba cya vacuum mugihe iguruka yerekeza kuri substrate, bigatuma icyerekezo cyerekezo kidasanzwe hamwe na firime yabitswe byoroshye kuba kimwe.

3 ating Ion

Mugihe cyimiterere ya vacuum, Mugihe cya vacuum, Yakoresheje tekinike runaka ya plasma ionisation kugirango igice cya ionise igice cya atome yibikoresho bitwikiriye ion. Muri icyo gihe kandi hakorwa atome nyinshi zitagira ingufu zitagira aho zibogamiye ， zibogamye kuri substrate.Mu buryo, ion. Bishyizwe hejuru yubutaka munsi yimbitse ibogamye kugirango ikore firime yoroheje.