Ion isobanura ko reaction cyangwa ibikoresho byavumbuwe bishyirwa kuri substrate hamwe na ion bombe ya ion ya gaz cyangwa ibikoresho byahumutse mugihe ibikoresho byavutse bitandukanijwe cyangwa gaze isohoka mucyumba cya vacuum.Ihame rya tekiniki ryibikoresho bikomeye byo gutwikira ni igikoresho cya cathode ion, ni tekinoroji ya cathode isohora.
Kubijyanye n'ihame ryo gusohora imyanda ya cathode: Ubuhanga bwo kubitsa bwa cathode ya cathode bukoresha uburyo bwa cathode bushyushye kugirango butange plasma, kandi cathode ni umuyoboro wa tantalum.Cathode hamwe na anode ifasha yegeranye, arizo nkingi ebyiri zaka arc isohoka.
Imbunda ya cathode isohora imbunda yo gutwika mu buryo bubiri.
1. ubushyuhe ntarengwa bwo gusohora electron no kubyara plasma electron beam.
2. ibisekuruza bya argon ion ibisasu bihora bitera ibisasu bya cathode tantalum, kugeza ubushyuhe bwa 2300K-2400K, umuyoboro wa cathode tantalum usohora electron nyinshi, bizahindurwa biva kuri "glow isohoka" bihindurwe "arc isohoka", iki gihe voltage nki munsi ya 30V-60V, hanyuma mugihe cyose cathode na anode hagati yumuriro w'amashanyarazi, urashobora kubyara plasma electron.
Ibikoresho byo gutwikira Cathodic
1 、 Kunoza imiterere yimbunda yumwimerere, kuva mwambere ntarengwa ya 230A kugeza 280A.
2 、 Kunoza imiterere yumwimerere ya sisitemu yo gukonjesha, uhereye kumyimerere ya 4 machine imashini yamazi yimbeho ikonjesha kugeza ubushyuhe bwicyumba cyo gukonjesha amazi, bikiza ikiguzi cyamashanyarazi kubakoresha.
3, Kunoza imiterere yumwimerere yoherejwe, yahinduwe muburyo bwo gukwirakwiza amazi ya magnetiki, ubushyuhe bwo hejuru ntibuzahuza ikizunguruka.
4, ahantu heza ho gutwikira ￠ 650X1100, irashobora kwakira 750 X 1250X600 ipfa kurenza urugero hamwe nabakora ibikoresho byo gukora broach ndende, hamwe nubunini bunini cyane.
Imashini itwikiriye ya cathode ion ikoreshwa cyane mugusiga ibikoresho, ibishushanyo, indorerwamo nini, indorerwamo za pulasitike, ibyuma bya hobbing nibindi bicuruzwa.
Igihe cyo kohereza: Ugushyingo-07-2022