Ni irihe hame rikora ryimashini ya Ion Plating

Ionimashini byaturutse ku gitekerezo cyatanzwe na DM Mattox mu myaka ya za 1960, kandi ubushakashatsi bujyanye nabwo bwatangiye icyo gihe;Kugeza mu 1971, Byumba n'abandi basohoye ikoranabuhanga rya elegitoroniki ya ion;Ikoreshwa rya tekinoroji ya tekinike (ARE) ryerekanwe muri raporo ya Bunshah mu 1972, igihe hakorwaga ubwoko bwa firime bukomeye cyane nka TiC na TiN;Muri 1972 kandi, Smith na Molley bakoresheje tekinoroji ya cathode mu buryo bwo gutwikira.Mu myaka ya za 1980, isahani ya ion mu Bushinwa amaherezo yari igeze ku rwego rwo gukoresha inganda, kandi uburyo bwo gutwikira nka vacuum multi-arc ion plaque na arc-isohora ion plaque byagaragaye neza.

Igikorwa cyose cyakazi cya vacuum ion isa nuburyo bukurikira: ubanza,pompeicyumba cya vacuum, hanyumarindiraumuvuduko wa vacuum kuri 4X10 ⁻ ³ Pacyangwa byiza, birakenewe guhuza ingufu z'amashanyarazi menshi no kubaka ubushuhe buke bwa plasma agace ka gaze gasohora gaze hagati ya substrate na moteri.Huza substrate electrode hamwe na 5000V DC itari nziza ya voltage kugirango ukore urumuri rwa cathode.Iyonge ya gaz ion ikorerwa hafi yumucyo mubi.Binjira muri cathode yijimye kandi byihutishwa numuriro w'amashanyarazi hanyuma batera ibisasu hejuru ya substrate.Nibikorwa byogusukura, hanyuma winjire muburyo bwo gutwikira.Binyuze mu bushyuhe bwo gutera ibisasu, ibikoresho bimwe byo gusiga bicanwa.Agace ka plasma kinjira muri proton, kakagongana na electron hamwe na ion ya gaz ya inert, kandi igice gito cyacyo kikaba ionisiyoneri, Izi ioni zifite ingufu nyinshi zizatera ibisasu hejuru ya firime kandi bizamura ubwiza bwa firime kurwego runaka.

Ihame rya plaque ya vacuum ni: mu cyumba cya vacuum, ukoresheje ibintu bisohora gaze cyangwa igice cya ionisiyonike cyibikoresho biva mu kirere, munsi y’ibisasu bya ioni cyangwa ion ion, bigashyira icyarimwe ibyo bintu byuka cyangwa reaction zabyo kuri substrate. kubona firime yoroheje.Ionimashiniikomatanya imyuka ya vacuum, tekinoroji ya plasma hamwe na gaze ya gazi isohoka, ibyo ntibizamura ubwiza bwa firime gusa, ahubwo binagura intera ikoreshwa ya firime.Ibyiza byiyi nzira ni diffaction ikomeye, guhuza firime nziza, nibikoresho bitandukanye byo gutwikira.Ihame ryo gufata ion ryatanzwe bwa mbere na DM Mattox.Hariho ubwoko bwinshi bwa plaque.Ubwoko bukunze kugaragara ni ubushyuhe bwo guhumeka, harimo gushyushya ibintu, gushyushya amashanyarazi ya elegitoronike, gushyushya amashanyarazi ya plasma electron, gushyushya induction inshuro nyinshi nubundi buryo bwo gushyushya.