1 principle Ihame rya tekinoroji ya vacuum ion
Ukoresheje tekinoroji ya vacuum arc mucyumba cya vacuum, urumuri rwa arc rutangwa hejuru yibintu bya cathode, bigatuma atome na ion bibumbira mubintu bya cathode.Mubikorwa byumurima wamashanyarazi, ibiti bya atome na ion bitera ibisasu hejuru yakazi nka anode kumuvuduko mwinshi.Muri icyo gihe, gaze ya reaction yinjizwa mu cyumba cya vacuum, kandi igipfundikizo gifite ibintu byiza cyane gikozwe hejuru yakazi.
2 、 Ibiranga vacuum ion
(1) Gufatanya neza kurwego rwo gutwikira, urwego rwa firime ntabwo byoroshye kugwa.
(2) Gupfundikanya neza no gutwikira neza.
(3) Ubwiza bwiza bwo gutwikira.
(4) Igipimo kinini cyo kubitsa no gushiraho firime byihuse.
(5) Ubwinshi bwibikoresho bya substrate bikwiye nibikoresho bya firime byo gutwikira
Ibikoresho binini-arc magnetron birwanya urutoki ibikoresho bifatanye
Imashini irwanya urutoki rwa magnetron ikoresha imashini ifata imashini ihuza imashini ya magnetron yo hagati, imashini ya arc nyinshi na tekinoroji ya AF, ikoreshwa cyane mu nganda zibyuma, ibikoresho byo kumeza, ibikoresho bya titanium ibyuma bitagira umuyonga, ibyuma bitagira umuyonga hamwe no gutunganya ibyuma binini bitagira umuyonga.Ifite neza, gusubiramo, ubucucike hamwe nuburinganire bwurwego rwa firime, umusaruro mwinshi hamwe numusaruro mwinshi.
Igihe cyo kohereza: Ugushyingo-07-2022