HiPIMS Ikoranabuhanga

No.1 Ihame ryimbaraga nyinshi pulsed magnetron sputtering
Ububasha bukomeye bwa pulsed magnetron sputtering tekinike ikoresha imbaraga zimpinga zimpanuka (2-3 ordre yubunini buruta ubwinshi bwa magnetron sputtering) hamwe ninshingano yo hasi ya pulse (0.5% -10%) kugirango igere ku gipimo kinini cyo gutandukana nicyuma (> 50%), ibyo ikomoka kuri magnetron iranga ibintu, nkuko bigaragara kuri Pic 1, aho impinga yibihe byubu I I ihwanye nimbaraga za nth power ya niveau ya voltage isohoka U, I = kUn (n ni ihora ijyanye nimiterere ya cathode, umurima wa magneti n'ibikoresho).Kumubyigano wo hasi (voltage nto) n agaciro mubisanzwe mubirometero 5 kugeza 15;hamwe no kwiyongera kwamashanyarazi, ubwinshi bwubu nubucucike bwimbaraga byiyongera byihuse, kandi kuri voltage nini n agaciro kaba 1 kubera gutakaza umurongo wa magneti.Niba ku bucucike buke, gusohora gaze kugenwa na ion ya gaz iri muburyo busanzwe bwo gusohora;niba ku bucucike bukabije, igipimo cya ioni yicyuma muri plasma cyiyongera kandi ibikoresho bimwe bigahinduka, ibyo bikaba muburyo bwo kwikinisha, ni ukuvuga plasma ikomezwa na ionisiyonike yibice bitagira aho bibogamiye hamwe na ioni yicyuma cya kabiri, hamwe na atome ya gaz ya inert nka Ar ikoreshwa gusa mugutwika plasma, nyuma yibice byicyuma bisunitswe byerekanwa hafi yintego kandi byihuta gusubira inyuma kugirango bitere igisasu cyatewe nigikorwa cyumuriro wa rukuruzi n amashanyarazi kugirango bikomeze gusohoka cyane, kandi plasma ni nyinshi ibice byicyuma.Bitewe nuburyo bwo gusohora kwingaruka zubushyuhe ku ntego, kugirango harebwe imikorere ihamye yintego mubikorwa byinganda, ubwinshi bwamashanyarazi bukoreshwa kurugero ntibushobora kuba bunini cyane, muri rusange gukonjesha amazi hamwe nibikoresho bifata ubushyuhe bwumuriro. bigomba kuba mubyerekeranye na 25 W / cm2 hepfo, gukonjesha amazi ataziguye, intego yibikoresho bitwara ubushyuhe bwumuriro ni bibi, ibikoresho byatewe no gucikamo ibice bitewe nubushyuhe bwumuriro cyangwa ibikoresho bigenewe birimo ibice bito bihindagurika kandi nibindi bibazo byubucucike bishobora kuba muri 2 ~ 15 W / cm2 hepfo, munsi yibisabwa byimbaraga nyinshi.Ikibazo cyo gushyushya intego kirashobora gukemurwa hakoreshejwe imbaraga ndende cyane.Anders isobanura imbaraga-nini cyane ya magnetron yihuta nkubwoko bwikubitiro aho ubwinshi bwimbaraga zirenga hejuru yubucucike bwikigereranyo cya 2 kugeza kuri 3 byerekana ubunini, kandi intego ya ion iganje yiganje muburyo bwo gusohora, kandi atome yibasiwe na atome ziratandukana cyane. .

No.2 Ibiranga imbaraga nyinshi pulsed magnetron sputtering coating deposition

Imbaraga nyinshi zisunikwa na magnetron zirashobora kubyara plasma ifite umuvuduko mwinshi wo gutandukana hamwe nimbaraga nyinshi za ion, kandi irashobora gukoresha igitutu kibogamye kugirango yihutishe ion zashizwemo, kandi uburyo bwo kubitsa igisasu bwatewe ibisasu ningufu nyinshi, nubuhanga busanzwe bwa IPVD.Ingufu za ion no gukwirakwiza bifite ingaruka zikomeye cyane kubwiza bwo gutwikira no gukora.
Kubijyanye na IPVD, hashingiwe ku cyitegererezo cy’akarere ka Thorton kazwi cyane, Anders yatanze icyerekezo cy’akarere k’imiterere irimo kubika plasma no gutera ion, byongereye isano hagati yimiterere yubushyuhe nubushyuhe hamwe n’umuvuduko w’ikirere mu cyitegererezo cy’akarere ka Thorton ku isano iri hagati y’imiterere, ubushyuhe nimbaraga za ion, nkuko bigaragara ku gishushanyo cya 2. Mugihe cyingufu nkeya ion zashizwemo, imiterere ya coating ihuye nicyitegererezo cya zone ya Thorton.Hamwe no kwiyongera kwubushyuhe bwo guta, inzibacyuho kuva mukarere 1 (korohereza fibre fibre kristal) mukarere T (kristu ya fibre yuzuye), akarere 2 (kristu yinkingi) nakarere ka 3 (akarere ka rerystallisation);hamwe no kwiyongera kwingufu za ion zishira, ubushyuhe bwinzibacyuho kuva mukarere 1 kugera mukarere T, akarere 2 nakarere ka 3 biragabanuka.Ububiko bwinshi bwa fibre kristal hamwe na kristu yinkingi irashobora gutegurwa mubushyuhe buke.Iyo imbaraga za ion zabitswe ziyongereye kuri gahunda ya 1-10 eV, ibisasu no gutobora ion hejuru yububiko bwashyizwe hejuru byiyongera kandi ubunini bwikoti bwiyongera.

No.3 Gutegura igipfundikizo gikomeye ukoresheje ingufu nyinshi za pulsed magnetron tekinoroji
Igipfundikizo cyateguwe nimbaraga zikomeye pulsed magnetron sputtering tekinoroji irushijeho kuba myiza, hamwe nubukanishi bwiza hamwe nubushyuhe bwo hejuru.Nkuko bigaragara ku gishushanyo cya 3, magnetron isanzwe isakaye ya TiAlN ni inkingi ya kristu yubatswe ifite ubukana bwa 30 GPa na Modulus ya Young ya 460 GPa;igipfundikizo cya HIPIMS-TiAlN ni 34 GPa ikomeye mugihe Modulus ya Young ari 377 GPa;ikigereranyo kiri hagati yubukomezi na modulus ya Young ni igipimo cyo gukomera kwifuniko.Gukomera cyane hamwe na Modulus ntoya bisobanura gukomera.Igipfundikizo cya HIPIMS-TiAlN gifite ubushyuhe buhanitse bwo hejuru, hamwe na AlN ya mpande esheshatu yaguye mu mwenda usanzwe wa TiAlN nyuma yo kuvura ubushyuhe bwo hejuru kuri 1.000 ° C kuri 4 h.Ubukomezi bwa coating buragabanuka kubushyuhe bwinshi, mugihe HIPIMS-TiAlN itwikiriye ntigihinduka nyuma yo kuvura ubushyuhe mubushuhe hamwe nigihe kimwe.HIPIMS-TiAlN itwikiriye kandi ifite ubushyuhe bwo hejuru bwo gutangira ubushyuhe bwo hejuru kuruta ubushyuhe busanzwe.Kubwibyo, igipfundikizo cya HIPIMS-TiAlN cyerekana imikorere myiza cyane mubikoresho byihuta byihuta kuruta ibindi bikoresho bifatanye byateguwe na PVD.