Ion beam yafashaga tekinoroji yo kubitsa

Mubyukuri, Ion beam yafashijwe tekinoroji yo kubitsa ni tekinoroji ihuriweho.Nuburyo bukomatanyije bwo kuvura ion ikomatanya ikomatanya ion hamwe nubuhanga bwa firime yohereza imyuka yumubiri, hamwe nubwoko bushya bwa tekinike ya ion beam tekinike.Usibye ibyiza byo kubika imyuka yumubiri, ubu buhanga bushobora gukomeza gukura firime iyo ari yo yose yubugingo mugihe gikabije cyo kugenzura, kunoza kristu no kwerekana icyerekezo cya firime cyane, kongera imbaraga zifatika za firime / substrate, kunoza ubucucike ya firime, kandi ikomatanya firime ikomatanya hamwe nigipimo cyiza cya stoichiometric hafi yubushyuhe bwicyumba, harimo ubwoko bushya bwa firime zidashobora kuboneka mubushyuhe bwicyumba nigitutu.Ion beam yafashijwe kubitsa ntibigumana gusa ibyiza byuburyo bwo gutera ion, ariko birashobora no gutwikira substrate hamwe na firime itandukanye rwose na substrate.
Ubwoko bwose bwimyuka yumwuka hamwe nubumara bwa chimique, hashobora kongerwamo imbunda ya ion bombardment ion imbunda zishobora kwongerwaho kugirango habeho sisitemu ya IBAD, kandi hariho inzira ebyiri rusange za IBAD kuburyo bukurikira, nkuko bigaragara kuri Pic:

Nkuko bigaragara muri Pic (a), isoko ya elegitoroniki ya elegitoronike ikoreshwa mu kurasa urumuri rwa firime hamwe n’ibiti bya ion biva mu mbunda ya ion, bityo bikamenya ko ibiti bya ion bifasha kubitsa.Akarusho nuko ingufu za ion beam nicyerekezo bishobora guhinduka, ariko gusa icyuma kimwe cyangwa kigarukira gusa, cyangwa ibivanze bishobora gukoreshwa nkisoko yo guhumeka, kandi buri muvuduko wumwuka wumuyaga wibintu bivangwa nibintu bitandukanye, bigatuma bigorana kubona firime ya layer yumwimerere wo guhumeka isoko.
Pic (b) yerekana ion beam sputtering-ifashijwe kubitsa, bizwi kandi ko byitwa ion beam sputtering deposition, aho intego ikozwe muri ion beam sputtering coating material, ibicuruzwa biva mu mahanga bikoreshwa nkisoko.Mugihe ubishyize kuri substrate, ion beam sputtering ifasha kubitsa bigerwaho no kurasa hamwe nandi masoko ya ion.Ibyiza byubu buryo nuko uduce duto duto ubwabo dufite imbaraga runaka, bityo hakabaho gufatana neza na substrate;ikintu icyo ari cyo cyose kigize intego gishobora gusukwa, ariko nanone gishobora kuba reaction zisohoka muri firime, byoroshye guhindura imiterere ya firime, ariko uburyo bwo kuyishyira hasi ni buke, intego ihenze kandi hariho ibibazo nko gutoranya guhitamo.