Ikoranabuhanga rya Ion

Ikintu nyamukuru kiranga uburyo bwa vacuum evaporation yo kubitsa firime nigipimo kinini cyo kubitsa.Ikintu nyamukuru kiranga uburyo bwa sputtering nuburyo bugari bwibikoresho bya firime biboneka hamwe nuburinganire bwiza bwurwego rwa firime, ariko igipimo cyo kubitsa ni gito.Ion coating nuburyo bukomatanya izi nzira zombi.

Ion coating ihame nuburyo bwo gukora firime
Ihame ryakazi ryo gutwika ion ryerekanwe muri Pic.Icyumba cya vacuum gipompa kumuvuduko uri munsi ya 10-4 Pa, hanyuma ukuzuzwa gaze ya inert (urugero argon) kumuvuduko wa 0.1 ~ 1 Pa.Nyuma ya DC itari nziza ya DC igera kuri 5 kV ikoreshwa kuri substrate, a umuvuduko ukabije wa gaze glow isohora plasma zone yashizweho hagati ya substrate na crucible.Gazi ya inert yihutishwa numurima wamashanyarazi kandi igatera hejuru ya substrate, bityo igasukura hejuru yakazi.Nyuma yibi bikorwa byogusukura birangiye, inzira yo gutwikira itangirana no guhumeka ibintu bigomba gutwikirwa mubikomeye.Ibicanwa biva mu bicu byinjira muri plasma ya plasma hanyuma bigahura na inert itandukanijwe na ion nziza na electron, kandi bimwe mubice byumwuka biva mu kirere bigatera ibisasu ku kazi ndetse nubuso bwa coater munsi yihuta ryumuriro wamashanyarazi.Muburyo bwa plaque ya ion, ntago habaho kubitsa gusa ahubwo no gusohora ion nziza kuri substrate, bityo firime yoroheje irashobora gukorwa mugihe gusa ingaruka zo kubitsa zirenze ingaruka ziterwa.

Igikorwa cyo gutwika ion, aho substrate ihora iterwa na ion zifite ingufu nyinshi, irasukuye cyane kandi ifite ibyiza byinshi ugereranije no gusohora no guhumeka.

(1) Kwizirika gukomeye, igipfundikizo ntigishobora gukuramo byoroshye.
. substrate kugirango isukure hejuru yubutaka kugeza inzira yose yo gutwikira irangiye.
. zishobora kunoza neza imikorere ya adhesion ya firime.
(2) Ibintu byiza bipfunyika.Impamvu imwe ni uko atome yibikoresho bitwikiriye ioni munsi yumuvuduko mwinshi kandi bigahura na molekile ya gaze inshuro nyinshi mugihe cyo kugera kuri substrate, kugirango ion zifatika zishobora gukwirakwira munsi yubutaka.Byongeye kandi, atome ya ionize yibikoresho byashyizwe hejuru yubutaka munsi yumurimo wumuriro wamashanyarazi, bityo substrate yose ikabikwa hamwe na firime yoroheje, ariko gutwika umwuka ntibishobora kugera kuri izi ngaruka.
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Ibibi byo gutwika ion ni: ubunini bwa firime ntibushobora kugenzurwa neza;kwibanda ku nenge ni byinshi iyo bisabwa neza;na gaze bizinjira hejuru mugihe cyo gutwikira, bizahindura imiterere yubuso.Rimwe na rimwe, imyenge na nuclei (munsi ya 1 nm) nabyo birakorwa.

Kubijyanye nigipimo cyo kubitsa, ion igereranya nuburyo bwo guhumeka.Kubijyanye nubwiza bwa firime, firime zakozwe na ion coating ziri hafi cyangwa nziza kuruta izateguwe no gusohora.