Plasma yazamuye imyuka ya chimique

Indwara ya plasma
Imiterere ya plasma muburyo bwa plasma yongerewe imbaraga mumashanyarazi ni uko ishingiye ku mbaraga za kinetic ya electron muri plasma kugirango ikore reaction yimiti mugice cya gaze.Kubera ko plasma ari ikusanyirizo rya ion, electron, atome zidafite aho zibogamiye na molekile, ntaho ibogamiye mumashanyarazi kurwego rwa macroscopique.Muri plasma, imbaraga nyinshi zibikwa mumbaraga zimbere za plasma.Plasma yabanje kwigabanyamo plasma ishyushye na plasma ikonje.muri sisitemu ya PECVD ni plasma ikonje ikorwa no gusohora gaze nkeya.Iyi plasma yakozwe numuvuduko muke uri munsi ya magana Pa ni plasma ya gaze idahwanye.
Imiterere yiyi plasma nki ikurikira:
(1) Imikorere idasanzwe yubushyuhe bwa electron na ion irenze icyerekezo cyayo.
(2) Igikorwa cyacyo cya ionisation giterwa ahanini no kugongana na electron yihuta na molekile ya gaze.
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(4) Gutakaza ingufu nyuma yo kugongana na electron nuduce twinshi birashobora kwishyurwa bivuye mumashanyarazi hagati yo kugongana.
Biragoye kuranga ubushyuhe buke bwa noquilibrium plasma hamwe numubare muto wibipimo, kuko nubushyuhe buke bwa noquilibrium plasma muri sisitemu ya PECVD, aho ubushyuhe bwa electron Te butameze nkubushyuhe Tj bwibice biremereye.Muri tekinoroji ya PECVD, umurimo wibanze wa plasma nugukora ion ikora chimique na free-radicals.Izi ion hamwe na-radicals yubusa bifata hamwe nizindi ion, atome na molekile mugice cya gaze cyangwa bigatera kwangirika kwa lattike hamwe nubushakashatsi bwimiti hejuru yubutaka, kandi umusaruro wibikoresho bikora ni umurimo wubucucike bwa electron, kwibanda kuri reaction hamwe na coefficient.Muyandi magambo, umusaruro wibikoresho bikora biterwa nimbaraga zumuriro wamashanyarazi, umuvuduko wa gaze, hamwe nimpuzandengo yubusa yubusa mugihe cyo kugongana.Mugihe gaze ya reaction muri plasma itandukana kubera kugongana kwa electron zifite ingufu nyinshi, inzitizi yibikorwa bya chimique irashobora kuneshwa kandi ubushyuhe bwa gaze reaction irashobora kugabanuka.Itandukaniro nyamukuru hagati ya PECVD na CVD isanzwe nuko amahame ya termodinamike ya reaction ya chimique atandukanye.Gutandukana kwa molekile ya gaze muri plasma ntabwo byatoranijwe, bityo rero firime ya firime yashyizwe na PECVD itandukanye rwose na CVD isanzwe.Ibice bigize icyiciro cyakozwe na PECVD birashobora kuba bidafite uburinganire bwihariye, kandi imiterere yabyo ntigikoreshwa na kinetics ya equilibrium.Igice cya firime gisanzwe ni amorphous leta.

Ibiranga PECVD
(1) Ubushyuhe buke.
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(3) Igipimo cyo kubitsa kiri hejuru cyane, cyane cyane ubushyuhe bwo hasi, bifasha kubona firime ya amorphous na microcrystalline.

Bitewe nubushyuhe buke bwa PECVD, kwangirika kwubushyuhe birashobora kugabanuka, gukwirakwira hamwe nigisubizo hagati ya firime ya firime nibikoresho bya substrate birashobora kugabanuka, nibindi, kugirango ibikoresho bya elegitoronike bishobora gutwikirwa haba mbere yuko bikozwe cyangwa kubikenewe. yo kongera gukora.Kugirango hakorwe amashanyarazi manini cyane (VLSI, ULSI), tekinoroji ya PECVD ikoreshwa neza mugushinga firime nitride ya silicon (SiN) nka firime yanyuma yo gukingira nyuma yo gushiraho insinga za Al electrode, ndetse no gusibanganya hamwe na gushiraho firime ya silicon oxyde nka interlayer insulation.Nkibikoresho bya firime yoroheje, tekinoroji ya PECVD nayo yakoreshejwe neza mugukora transistors yoroheje (TFTs) ya LCD yerekana, nibindi, ukoresheje ikirahuri nka substrate muburyo bukoreshwa bwa matrix.Hamwe niterambere ryumuzunguruko uhuriweho kugeza murwego runini no kwishyira hamwe no gukoresha cyane ibikoresho byifashishwa bya semiconductor, PECVD irasabwa gukorerwa ubushyuhe buke hamwe nuburyo bukomeye bwa electron.Kugira ngo ibyo bisabwa bishoboke, tekinoroji ishobora guhuza firime yo hejuru yubushyuhe bwo hasi igomba gutezwa imbere.Filime za SiN na SiOx zakozweho ubushakashatsi bwimbitse hakoreshejwe plasma ya ECR hamwe nubuhanga bushya bwa plasma chimique vapor deposition (PCVD) hamwe na plasma ihindagurika, kandi bugeze ku rwego rufatika mugukoresha firime zo mu bwoko bwa insulaire intera nini cyane, hamwe nibindi.