Mubisanzwe reaction ya CVD ishingiye kubushyuhe bwo hejuru, niyo mpamvu bita amashyanyarazi ashushe cyane (TCVD).Mubisanzwe ikoresha inorganic preursors kandi ikorerwa mumashanyarazi ashyushye hamwe nimbeho ikonje.Uburyo bushyushye burimo gushyushya radiyo (RF) gushyushya, gushyushya imirasire yimirasire, gushyushya kurwanya, nibindi.
Urukuta rushyushye rwa chimique
Mubyukuri, urukuta rushyushye rukora imyuka ihumeka ni itanura rishyushye, ubusanzwe rishyuha hamwe nibintu birwanya, kugirango bikorwe rimwe na rimwe.Igishushanyo cyurukuta rushyushye rukora imyuka yo kubitsa ibikoresho byo gukuramo ibikoresho bya chip byerekanwe nkibi bikurikira.Iyi myuka ishyushye-yamashanyarazi irashobora kwambika TiN, TiC, TiCN nizindi firime zoroshye.Imashini irashobora gushushanywa nini bihagije hanyuma igafata umubare munini wibigize, kandi ibintu birashobora kugenzurwa neza cyane kubitsa.Pic 1 yerekana igikoresho cya epitaxial layer ya silicon doping yumusaruro wa semiconductor.Substrate mu itanura ishyirwa mu cyerekezo gihagaritse kugirango igabanye kwanduza ubuso bwajugunywe nuduce, kandi byongere umusaruro mwinshi.Imashini ishyushye-yumusaruro wa semiconductor isanzwe ikorwa kumuvuduko muke.
Igihe cyo kohereza: Ugushyingo-08-2022