1) O sini fa'akomepiuta e sili atu le fa'aogaina o fua fa'atatau nai lo fa'amoemoega fa'atatau.I le faagasologa o le ufiufi, pe o se ituaiga maneta rotary po o se faagaau rotary ituaiga cylindrical sputtering taulaiga, vaega uma o le i luga o le faagaau sini faaauau pea e ui atu i le vaega sputtering gaosia i luma o le maneta tumau e maua cathode sputtering, ma le taula'iga e mafai ona tutusa sputtered etched, ma le fua faatatau fa'aoga e maualuga.Ole fua ole faʻaaogaina o mea faʻatatau ile 80% ~ 90%.
2) Ole a le faigofie le fa'atupuina o le 'ona o'ona.I le taimi o le faʻagasologa o le ufiufi, o le pito i luga o le faʻapipiʻi faʻapipiʻi e masani lava ona sputtered ma togitogia e ions, ma e le faigofie ona faʻaputuina oxides mafiafia ma isi insulating ata i luga o le fogaeleele, ma e le faigofie ona maua ai le "oona sini".
3) O le faʻatulagaina o le faʻaogaina o le tui faʻapipiʻi ituaiga cylindrical sputtering target e faigofie ma faigofie ona faʻapipiʻi.
4) O le cylindrical target tube mea e eseese ituaiga.fuafuaga fuafuaga ma taulaiga uʻamea malulu vai tuusao, ma o nisi e le mafai ona faagaoioia ma faia sini cylindrical, e pei o le In2-SnO2 sini, ma isi ma mea efuefu mo vevela isostatic oomi e maua sini ipu-pei, ona o le tele e le mafai ona faia. tele, ma brittle, o lea e tatau ai ona faʻaogaina metotia brazing ma backplate apamemea e tuʻufaʻatasia ona faʻapipiʻi lea i luga o le faʻavae autu.I le faʻaopoopoga i paipa uʻamea, e mafai foʻi ona faʻapipiʻi faʻamau i luga o le pito i luga o paipa uʻamea ma mea eseese e manaʻomia ona ufiufi, e pei o Si, Cr, ma isi.
I le taimi nei, o loʻo faʻatupulaʻia le aofaʻi o sini faʻataʻavalevale mo le faʻapipiʻiina i gaosiga o fale gaosimea.Cylindrical sini e le gata e faʻaaogaina mo le masini faʻapipiʻi saʻo ae faʻaaoga foi i le lola e taʻavale ai masini faʻapipiʻi.I tausaga talu ai nei, ua faasolosolo malie le suia o le masaga planar i le Cylindrical twin targets.
——O lenei tusiga na tatalaina e Guangdong Zhenhua Technology, agaosiga o masini fa'apipi'i mata.
Taimi meli: Me-11-2023