O lefa'apipi'i gaogaofa'agasologa masini ua vaevaeina i: fa'amama fa'afu'efu fa'afu'efu, fa'afuifu fa'afufu fa'afufu fa'alava ma fa'alava ion fa'alava.
1, Vreumum evaporation coating
I lalo o le tulaga gaogao, faia le mea evaporated, e pei o le uʻamea, uʻamea uʻamea, ma isi mea ona tuu i latou i luga o le substrate luga, o le evaporation ufiufi auala e masani ona faaaoga le faamafanafanaina tetee, ona pomu electron beam o le mea ufiufi, faia i latou. fa'asao i le vaega kasa, ona teuina lea i luga o le substrate luga, talafaasolopito, fa'amuta vacuum deposition o le tekinolosi muamua na fa'aaogaina i le PVD auala.
2、Sputtering ufiufi
O le kesi o loʻo tuʻuina atu i lalo o le (Ar) -tumu tulaga gaogao. e faia i mea faʻapipiʻi, o le faʻamoemoe o le a faʻafefe i fafo ma tuʻu i luga o le substrate faʻalavelave faʻalavelave faʻafuaseʻi i le faʻapipiʻiina, e masani lava ona maua mai i le susulu o le susulu, o loʻo i le va o le 10-2pa i le 10Pa，O lea e faigofie ai ona faʻafefeina mea faʻapipiʻi. fa'atasi ai ma moleke kasa i totonu o le potu vacuum pe a lele agai i le substrate, fa'atupu fa'afuase'i le itu fa'agasolo ma fa'afaigofie le fa'ameamea.
3, faʻapipiʻi ion
I lalo o le tulaga gaogao, I lalo o le tulaga gaogao, Faʻaaogaina se faʻaogaina o le plasma ionization metotia e faʻapipiʻi ai vaega o mea faʻapipiʻi i ions. I le taimi lava e tasi e gaosia ai le tele o le malosi maualuga, lea e faʻaituau leaga i luga o le substrate. I lenei auala, ions. o lo'o fa'aputu i luga o le mea'ai i lalo o se fa'aituau leaga loloto e fai ai se ata manifinifi.
Taimi meli: Mati-23-2023