Meafaigaluega faʻapipiʻi faʻapipiʻi o le magnetron sputtering ma le cathodic multi-arc ion coating e mafai ona galue eseese ma i le taimi e tasi;e mafai ona teuina ma saunia ata u'amea mama, u'amea fa'apipi'i ata po'o ata tu'ufa'atasi;e mafai ona avea ma se vaega e tasi o le ata ma se fa'aputuga fa'aputu fa'aputu.
O ona tulaga lelei e pei ona taua i lalo:
E le gata ina tuʻufaʻatasia le lelei o le faʻaofuofu ion eseese ma e amanaʻia le sauniuniga ma le tuʻuina o ata manifinifi mo vaega eseese o le faʻaaogaina, ae faʻatagaina foi le tuʻuina atu ma le saunia o ata monolithic multi-layer poʻo le tele-layer composite films i le vacuum tutusa. potu faʻapipiʻi i le taimi e tasi.
O faʻaoga o faʻaputu ata tifaga e faʻaaogaina lautele ona tekinolosi o loʻo i ni ituaiga eseese, o mea masani e pei ona mulimuli mai:
(1) O le tuufaatasiga o le le paleni magnetron sputtering ma cathodic ion plateing tekinolosi.
O lona masini o loʻo faʻaalia i lalo.O se meafaigaluega faʻapipiʻi faʻapipiʻiina o le faʻaogaina o le magnetron columnar ma le planar cathodic arc ion coating, lea e fetaui lelei mo meafaigaluega uma e faʻapipiʻi ai ata ma faʻapipiʻi ata teuteu.Mo meafaigaluega faʻapipiʻi, o le cathodic arc ion coating e faʻaaogaina muamua mo le faʻapipiʻiina o le faavae, ona faʻaaogaina lea o le koluma magnetron mo le faʻapipiʻiina o le nitride ma isi mea ata tifaga e maua ai se ata tifaga maualuga meafaigaluega.
Mo le ufiufi teuteu, TiN ma ZrN teuteu ata e mafai ona teuina e le cathodic arc coating muamua, ona doped i uʻamea e faʻaaoga ai sini magnetron, ma o le aafiaga doping e matua lelei.
(2) O le tuufaatasiga o le masaga vaalele magnetron ma koluma cathode arc ion coating metotia.O loʻo faʻaalia le masini e pei ona mulimuli mai.O loʻo faʻaaogaina le tekonolosi masaga alualu i luma, pe a faʻafesoʻotaʻi lua faʻataʻitaʻiga masaga itu i le tuʻuina atu o le eletise alalaupapa, e le gata ina manumalo i le faʻamaʻiina o le DC sputtering, afi ma isi drawbacks;ma e mafai ona teuina Al203, SiO2 oxide ata tifaga lelei, ina ia faateleina ma faaleleia le tetee oxidation o vaega ufiufi.Columnar multi-arc taulaʻi faʻapipiʻiina i le ogatotonu o le potu gaogao, e mafai ona faʻaaogaina le mea faʻatatau Ti ma Zr, e le gata ina ia faatumauina le lelei o le maualuga o le tele-arc dissociation fua faatatau, faʻaputu fua, ae e mafai foi ona faʻaitiitia lelei "droplets" i totonu. o le faagasologa o le vaalele laiti multi-arc faʻapipiʻi sini, e mafai ona teuina ma saunia se porosity maualalo o uʻamea ata, faʻapipiʻi ata.Afai o Al ma Si e fa'aaogaina e fai ma mea fa'atatau mo le masaga planar magnetron sini fa'apipi'i i le pito, Al203 po'o Si0 u'amea-ceramic ata tifaga e mafai ona teuina ma saunia.E le gata i lea, o le tele o vaalele laiti o le tele-arc evaporation source e mafai ona faʻapipiʻiina i le pito i tua, ma o ana mea faʻatatau e mafai ona avea ma Cr poʻo Ni, ma e mafai ona teuina ma saunia ata tifaga uʻamea ma multilayer composite.O le mea lea, o lenei tekinolosi faʻapipiʻi faʻapipiʻi o se tekonolosi faʻapipiʻi faʻatasi ma le tele o faʻaoga.
Taimi meli: Nov-08-2022