Iyo midziyo inotora yakamira pamberi pegonhi chimiro uye cluster marongero.Inogona kuve yakashongedzerwa ne evaporation masosi esimbi uye akasiyana organic zvinhu, uye inogona kufefetedza silicon wafers eakasiyana maratidziro.Yakashongedzerwa neiyo chaiyo alignment system, iyo yekupfekedza yakagadzikana uye iyo coating ine yakanaka kudzokorora.
GX600 yekupotera michina inogona nemazvo, zvakaenzana uye zvinodzoreka kunyungudutsa organic light-emitting zvinhu kana simbi zvinhu pane substrate.Iine zvakanakira nyore firimu kuumbwa, yakakwirira kuchena uye yakakwirira compactness.Iyo yakazara-otomatiki firimu ukobvu chaiyo-nguva yekutarisa system inogona kuve nechokwadi chekudzokorora uye kugadzikana kwemaitiro.Iyo inoshongedzerwa ne self melting basa kuderedza kutsamira pane hunyanzvi hwemushandisi.
Iyo midziyo inogona kuiswa kuCu, Al, Co, Cr, Au, Ag, Ni, Ti uye zvimwe zvinhu zvesimbi, uye inogona kuputirwa nesimbi firimu, dielectric layer film, IMD film, etc. inonyanya kushandiswa mune semiconductor. indasitiri, senge magetsi emagetsi, semiconductor rear packaging substrate coating, nezvimwe.
GX600 | GX900 |
φ600*800(mm) | φ900*H1050(mm) |