HFCVD0606

Iyo vacuum yekuputira imba yemakemikari vapor deposition midziyo inotora yakazvimiririra yakapetwa kaviri-layer mvura-inotonhorera chimiro, inoshanda uye yakafanana mukutonhodza, uye ine yakachengeteka uye yakagadzikana chimiro.Midziyo yacho yakagadzirwa nemagonhi maviri, mahwindo ekutarisa akawanda uye akawanda ekuwedzera maficha, ayo ari nyore kune ekunze kubatana kweanobatsira peripherals senge infrared tembiricha kuyerwa, spectral kuongororwa, vhidhiyo yekutarisa uye thermocouple.Iyo yepamusoro dhizaini pfungwa inoita kuti kuwedzeredza uye kugadzirisa kwezuva nezuva, kuchinjika kwekugadzirisa uye kukwidziridzwa kwemidziyo kuve nyore uye kwakapusa, uye zvinobudirira kuderedza kushandiswa nekusimudzira mutengo.

Equipment features:

1. Izvo zvikamu zvekukwira kwezvinhu zvemidziyo zvinonyanya zvinosanganisira kuyerera kwemamita, solenoid valve uye gasi rekusanganisa tangi, iyo inovimbisa kutonga kwakaringana kwekuyerera kwegasi kuyerera, kusanganisa yunifomu uye kuparadzaniswa kwakachengeteka kwemagasi akasiyana, uye inogona kusarudza gasi system zvikamu zvekushandisa. liquid gasi sosi, fambisa kusarudzwa kwemunhu kwakasiyana siyana kwemvura kabhoni masosi, uye kushandiswa kwakachengeteka kweanogadzira conductive diamond uye electrode mvura boron masosi.
2.Kusangana kwemhepo kunogadzirwa nemhepo yakanyarara uye inobudirira rotary vane vacuum pombi uye turbo molecular pump system inogona kukurumidza kusangana nepamusoro pekutsvaira kwemashure.Iyo composite vacuum gauge ine resistance gauge uye ionization gauge inoshandiswa pakuyera vacuum, pamwe chete necapacitive film gauge system iyo inogona kuyera kudzvanywa kwemagasi akasiyana-siyana mumhando dzakasiyana.Iyo deposition pressure izere otomatiki inodzorwa nepamusoro-chaiyo proportional control valve.
3.Chikamu chemvura inotonhorera yakashongedzerwa ne-multi-channel water pressure, kuyerera, kuyerwa kwekushisa uye software automatic monitoring.Zvikamu zvakasiyana zvekutonhora zvakasununguka kubva kune mumwe nemumwe, izvo zviri nyore kukurumidza kuongororwa kukanganisa.Mapazi ese ane mavharuvhu akazvimirira, ayo akachengeteka uye anoshanda.
4.Magadzirirwo emagetsi ekugadzirisa magetsi anotora hukuru-hukuru man-machine interface LCD skrini uye inobatana nePLC yakazara-otomatiki kutonga kuti iite nyore kugadzirisa uye kutengeswa kwemaitiro ekugadzirisa.Iyo graphical curve inoratidzika kuratidza shanduko uye kukosha kweakasiyana ma paramita, uye zvishandiso uye maparamita ekuita zvinorekodhwa otomatiki uye kuchengetwa kuti zvifambise dambudziko rekutevera uye data statistical analysis.
5.Iyo workpiece rack yakashongedzerwa ne servo motor kudzora kusimudza uye kudzikisa kwe substrate tafura.Iyo graphite kana tsvuku mhangura substrate tafura inogona kusarudzwa.Tembiricha inopimwa ne thermocouple.
6.The rack zvikamu zvinogona kugadzirwa sese kana zvakasiyana maererano nezvinodiwa nemutengi kuti asangane neakakosha kubata zvinodiwa nevatengi.
7.The sealing plate components yakanaka uye yakanaka.Iyo yekuisa chisimbiso mahwendefa munzvimbo dzakasiyana dzinoshanda module dzemidziyo inogona kukurumidza kupatsanurwa kana kuvhurwa uye kuvharwa zvakazvimirira, izvo zviri nyore kushandisa.

Hot filament CVD midziyo inokodzera kuisa madhaimani zvinhu, zvinosanganisira firimu rakaonda, rinozvitsigira gobvu firimu, microcrystalline uye nanocrystalline diamond, conductive diamond, nezvimwewo. Inonyanya kushandiswa pakupfeka-inodzivirira inodzivirira coating yecemented carbide yekucheka maturusi, semiconductor zvinhu. senge silicon uye silicon carbide, kupisa kupisa kupisa kwemidziyo, boron doped conductive diamond electrode, ozone disinfection ye electrolytic mvura kana sewage treatment.