Hunhu hweCVD coating equipment

CVD coating tekinoroji ine zvinotevera maitiro:

1. Kushanda kwemaitiro emidziyo yeCVD iri nyore uye inoshanduka, uye inogona kugadzirira mafirimu ega kana akabatanidzwa uye mafirimu alloy ane zvikamu zvakasiyana;

2. CVD kupfeka kune zvakasiyana-siyana zvekushandisa, uye inogona kushandiswa kugadzira zvakasiyana-siyana zvesimbi kana simbi firimu rekugadzira;

3. Kubudirira kwekugadzirwa kwepamusoro nekuda kwezviyero zvekuisa kubva pamamicrons mashoma kusvika kumazana emakroni paminiti;

4. Kuenzaniswa nePVD nzira, CVD ine zvirinani diffraction performance uye yakanyatsokodzera kupfekedza substrates nemhando dzakaoma, dzakadai semagrooves, maburi akavharwa, uye kunyange mapofu maburi maburi.Iyo yekupfekedza inogona kuiswa mufirimu ine compactness yakanaka.Nekuda kwekupisa kwakanyanya panguva yekugadzira firimu, uye kunamatira kwakasimba pane iyo firimu substrate interface, iyo firimu layer yakasimba kwazvo.

5. Kukuvadzwa kunokonzerwa nemwaranzi kwakaderera uye kunogona kusanganiswa neMOS integrated circuit process.

——Chinyorwa ichi chakatsikiswa naGuangdong Zhenhua, avacuum coating machine mugadziri