① Kudzora kwakanaka uye kudzokororwa kweiyo firimu ukobvu
Kunyangwe iyo firimu ukobvu hunogona kudzorwa pane yakafanotemerwa kukosha inonzi firimu ukobvu controllability.Iyo inodiwa firimu ukobvu inogona kudzokororwa kwenguva dzakawanda, iyo inonzi firimu ukobvu repeatability.Nekuti kuburitsa ikozvino uye chinangwa chazvino chevacuum sputtering coating chinogona kudzorwa zvakasiyana.Naizvozvo, ukobvu hwefirimu rakapushwa hunodzoreka, uye firimu rine ukobvu hwakafanotemerwa rinogona kuiswa zvakavimbika.Mukuwedzera, iyo sputter coating inogona kuwana firimu ine yunifomu ukobvu panzvimbo yakakura.
② Kunamatira kwakasimba pakati pefirimu uye substrate
Simba remaatomu akapfapfaidzwa rakareba 1-2 maodha ehukuru kupfuura aya emaatomu akaputika.Kushandurwa kwesimba kwemaatomu ane simba guru-rakaputsirwa akaiswa pasubstrate kwakakwira zvikuru kupfuura kuya kwemaatomu akabuda evaporated, ayo anobudisa kupisa kwakanyanya uye kunonamira kunama pakati pemaatomu akapfapfaidzwa nesubstrate.Pamusoro pezvo, mamwe maatomu ane simba guru-rakapushwa anoburitsa madhigirii akasiyana ejekiseni, achigadzira pseudodiffusion layer pane substrate.Uye zvakare, iyo substrate inogara yakacheneswa uye inogadziriswa munharaunda yeplasma panguva yekugadzira firimu, iyo inobvisa maatomu ekuputira neasina kusimba, uye inonatsa uye activate substrate pamusoro.Nokudaro, iyo firimu yakasvibiswa ine kunamatira kwakasimba kune substrate.
③ Nyowani firimu rezvinhu zvakasiyana kubva kune chinangwa rinogona kugadzirwa
Kana gasi rinoita basa rinounzwa panguva yekupopota kuti riite pamwe chete nechinangwa, firimu idzva rakasiyana zvachose kubva kune chinangwa rinogona kuwanikwa.Semuyenzaniso, silicon inoshandiswa seyekupopotera, uye okisijeni neargon zvinoiswa mukamuri yekutsvaira pamwe chete.Mushure mekuputika, SiOz insulating firimu inogona kuwanikwa.Uchishandisa titanium sechinangwa chekuputira, nitrogen neargon zvinoiswa mukamuri yekutsvaira pamwe chete, uye chikamu cheTiN goridhe-sefirimu firimu rinogona kuwanikwa mushure mekupopota.
④ Kuchena kwepamusoro uye kunaka kwemufirimu
Sezvo pasina crucible component mu sputtering film preparation device, zvikamu zve crucible heater material hazvizosanganiswa mu sputtering film layer.Izvo zvisingabatsiri zvekuputira sputtering ndezvekuti iyo firimu yekugadzira kukurumidza inononoka pane iyo yekuputira coating, iyo substrate tembiricha yakakwira, zviri nyore kukanganiswa negasi rekusachena, uye chimiro chemudziyo chakanyanya kuoma.
Ichi chinyorwa chakaburitswa naGuangdong Zhenhua, mugadziri wevacuum coating equipment
Nguva yekutumira: Kurume-09-2023