Maitiro Kuyerera kweSputtering Coating Machine

1. Bombardment yekuchenesa substrate

1.1) Sputtering coating muchina shandisa glow discharge kuchenesa substrate.Kureva kuti, chaja iyo argon gasi mukamuri, kubuda kwemagetsi kutenderedza 1000V, Mushure mekubatidza magetsi, kubuda kunopenya kunogadzirwa, uye substrate inocheneswa neargon ion bombardment.

1.2) Mumichina yekuputira yekuputira iyo mumaindasitiri inogadzira zvishongo zvepamusoro, titanium ion inoburitswa nediki arc masosi inonyanya kushandiswa kuchenesa.Muchina wekuputira wekuputira wakashongedzerwa nediki arc sosi, uye titanium ion rukova muarc plasma inogadzirwa nediki arc source discharge inoshandiswa kubhomba nekuchenesa substrate.

2. Titanium nitride coating

Kana uchiisa titanium nitride mafirimu matete, izvo zvinonangwa zvekuputira ndeye titanium chinangwa.Chinhu chinonangwa chakabatanidzwa kune negative electrode ye sputtering power supply, uye chinangwa chemagetsi i400 ~ 500V;Iyo argon flux yakagadziriswa, uye iyo yekudzora vacuum ndeye (3 ~ 8) x10^-1PA.Iyo substrate yakabatanidzwa kune yakaipa electrode ye bias simba rekupa, ine voltage ye100 ~ 200V.

Mushure mekubatidza simba reiyo sputtering titanium yakanangana, kubuda kunopenya kunogadzirwa, uye maayoni ane simba guru anobhomba kupfutidza kwaakananga, achimwaya maatomu etitanium kubva pane chinangwa.

Iyo reaction gasi nitrogen inounzwa, uye maatomu etitanium nenitrogen anoiswa mutitanium ion uye nitrogen ions mukamuri yekuputira.Pasi pekukwezva kweiyo negative bias electric field inoshandiswa kune substrate, titanium ions uye nitrogen ions zvinokurumidza kusvika pamusoro pe substrate yemakemikari reaction uye deposition kuti iite titanium nitride film layer.

3. Bvisa substrate

Mushure mekusvika kune yakafanotemerwa firimu ukobvu, dzima sputtering magetsi, substrate bias magetsi, uye mhepo sosi.Mushure mekunge tembiricha ye substrate yadzikira kupfuura 120 ℃, zadza imba yekuputira nemhepo uye bvisa iyo substrate.

Chinyorwa ichi chakatsikiswa namagnetron sputtering coating machine mugadziri– Guangdong Zhenhua.