Maitiro ehollow cathode ion coating

Maitiro ehollow cathode ion coating ndeaya anotevera:

1, Isa Chin ingots mukudonha.

2, Kuisa workpiece.

3, Mushure mekubuda kuenda ku5 × 10-3Pa, argon gasi inounzwa mukamuri yekuputira kubva kune sirivheri chubhu, uye vacuum level iri kutenderera 100Pa.

4.Batidza simba rekurerekera.

5,Mushure mekubatidza arc simba rekubatidza buri cathode discharge.Iyo inopenya inobuda mubhatani chubhu,Discharge voltage i800~1000V,The arc-raising current i30~50A.Nekuda kwehollow cathode mhedzisiro yekupenya. kuburitsa, Kupenya kwakanyanya kunoburitsa iko density, Kuwanda kwemakonzo muchubhu yesirivha inobhowa madziro echubhu yevantage, Ita kuti chubhu yemadziro ikurumidze kudziya kusvika pakubuda kweelectron kuyerera, iyo yekuburitsa modhi kubva mukupenya inobuda inoshanduka nekukasira. arc discharge,Voltage is 40~70V, Current is 80~300A.Silver chubhu tembiricha inosvika pamusoro pe2300K,Incandescent,Inoburitsa high density stream yearc electrons kubva muchubhu,uye inopfura kune anode.

6, Kugadziridzwa kwevacuum level. The vacuum level yekupenya kubva mugomba cathode pfuti inenge 100 Pa,Uye dhigirii rekuputira ndiro 8 × 10-1 ~ 2Pa. Naizvozvo, Mushure mokudzima kwearc discharge, Deredza argon inouya. gasi nekukurumidza sezvinobvira, Gadzirisa iyo vacuum level kune renji yakakodzera kupfekwa.

7, Titanium plated base layer.Electron inoyerera ichienda kune anodically akadonha Chin metal ingot,Shanduko yesimba rekinetic kuenda kusimba rinopisa,Kubuda kwesimbi yeChin nekudziisa,Maatomu emhute anosvika pakushanda kugadzira titanium firimu.

8,Kuiswa kweTiN.Nitrogen gasi inopihwa mukamuri yekuputira,Gasi reNitrogen nemaatomu akabuda evaporated zvinoiswa munitrogen netitanium ion.Pamusoro peiyo crucible,Mukana wepamusoro wekudhumhana kweinelastic yemaatomu emhute yetitanium ine hova dzakasimba dzemagetsi asina simba, Metal dissociation rate yakakwira kusvika pa20% ~40%.,Titanium ions inokwanisa kuita makemikari neaitirojeni gasi rekuita,Deposition kuwana nitride mantle film layer.Iyo hollow cathode pfuti zvese zviri vaporization source，Kumwe kunobva yeionization.Panguva yekuputira, Iyo ikozvino ye electromagnetic coil yakatenderedza crucible inofanirawo kugadziridzwa,Tarisa danda re electron pakati pekudonha,Nekudaro, simba remagetsi rekuyerera kwe electron rinowedzera.

9、Simba Kudzima.Mushure mekukora kwefirimu kwasvika kufanotemerwa firimu ukobvu,Dzima arc simba rekupa,Bias simba rekupa uye mhepo inopihwa.